C92

13 15 15 18 22,5 31 10 10 11 11 15 15 18 20 10 12 12 16 16 20 25 32 5,5 5,5 6,6 6,6 9 9 11 14 38 41 50 52 66 76 94 118 51 54 65 67 86 96 124 156 10 10 14 14 18 20 28 34 21 24 33 37 47 55 70 97 4 4 6 6 6 6 18 23 18 22 30 35 40 50 60 88 26 28 32 40 50 60 70 90 31 35 45 50 60 70 90 126 32 36 45 50 63 71 90 115 8 10 12 12 14 15 20 25 32 40 50 63 80 100 125 160 1.12-8 ISO Cylinder/Standard: Double

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Air Cylinder NCA1 Series

7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16

NCA1

3 3.125 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 12 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 1/2 7 5/8 4 5/8 11 3/8 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 8 7/8 5 1/2 12 7/8 F G J K L MR 3/4 2 1 1/2 9/16 1 1/2 1 3/16 3/4 2 1/4 2 11/16 2 1/8 1 5/8 3/4 2 1/4 2 11/16 2 1/4

Low Friction Cylinders Series MQ

B L F G C Note 1) Basic type Foot type Rod side flange type Head side flange type (Except for 6) Single clevis type (Non-integrated type) Double clevis type 10 15, 30, 45, 60, 75, 100 16 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

Compressed Air Preparation Filter

20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

Compact Cylinder with Lock Series CLQ

116.5 53.5 11 11 4 x FD FX FZ L G B + Stroke CLS A + Stroke 100 135 63 11 11 CLQ Bore size (mm) FV FX FZ G L L1 M 63 80 100 RLQ 80 99 117 92 116 136 108 134 154 38 43 50 18 20 22 43.5 53.5 53.5 60 77 94 L1 Rod end nut MLU Head Side flange style: CLQG/CDLQG Head Side Flange Style MLGP (mm) Stroke range Without auto switch With auto switch Bore size (mm) FD FT ML1C A A B B 36 46 43.5 53.5

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

(S2) 200 to 230 VAC encoder) Absolute Power supply voltage 50/60 Hz AC servo motor (S7) AC servo motor (S3) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz AC servo motor (S6) 100 to 120 VAC Pulse input type 50/60 Hz AC servo motor (S7) (For absolute AC servo motor (S6) 200 to 230 VAC encoder) 50/60 Hz AC servo motor (S7) Dimensions LECSA 2 x 6 Mounting hole 40 135 (Bearing surface

Refrigerated Air Dryer

N Nil K L R S T V Size Size 22E 37E 55E 75E Voltage Symbol Voltage Applicable size 37E 55E 22E 75E Single-phase 115 VAC (60 Hz) 11 Single-phase 230 VAC (60 Hz) 23 Three-phase 460 VAC (60 Hz) 46 Thread type Thread type Drain tube size Symbol N Nil 3/8 NPT (male) 0.4 in [10 mm] R (male) Table of Options and Available Combinations (Size/Option) K L R S T V Nil Symbol Note 1) With heavy

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4 60 75 9 10 19 500 300 300 30 134 3.2 171 500 300 52 45 143 39 18 177 188 11 53 53 77 154 154 7 10 47.3 11 10 44.5 143.5 82

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Z DA DDH10 (Hole) DU DC DX DE DO DR DT DS DH DF B W1 DL MGQ CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 40 50 63 80 100 10 165 57 11 65 15 85 10 9 17 8 40 52 60 35 +0.058 0 10 10 183 57 35 11 65 18 85 10 9 17 8 40 52 70 +0.070 0 12 MGG 10 196 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 +0.070 0 16 12 235 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 +0.084 0 20 MGC 12 256 93 16.5 100 35.5 130

A

36 98 30 24 ANA1-06 3/4 90 110 111 46 36 ANA1-10 1 160 180 132 50 41 ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871 271 86 70 D I M

Air Slide Table Series MXP

Load (N) 20 40 60 Load (N) 20 40 60 Load (N) 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.06 0.03 0.02 0.04 0.02 0.01 0.02 0.01 0 0 0 20 40 60 80 Load (N) 20 40 60 80 Load (N)

VM

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

VDW

M5 10 42.5 4 11 15.5 30 15 22 20 8 13.5 M3 M5, 1/8 11 5 15 17 36.5 11 Series VDW Glossary of Terms Pressure Terminology Others 1.

ZPT/ZPX

-87 6 Series ZPT ZPT HB-A16 (Male thread) 100 125 100 125 ZPT HB-B (Female thread) M16 x 1.5 Hexagon width across flats 22 Rc 1/8 6 6 Hexagon width across flats 24 70 25 70 Width across flats 60 4-M5 x 0.8 G 4-M5 x 0.8 11 11 G Width across flats 60 F F E E Y Y Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

90

Suction flow (Silencer exhaust) 60 Air consumption 40 20 Port exhaust Silencer exhaust 0 0 20 40 60 80 Suction flow [L/min (ANR)] ZK215 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 150 100 135 Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption 80 120 105 Vacuum pressure 60 0 15 30 45 60 75 90 40

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Specifications W A D With shock absorber (mm) 11-MXPJ6 11-MXP10 11-MXP12 11-MXP16 Model MXPJ6 MXP10 MXP6 MXP12 MXP16 Model Cylinder bore size (mm) 6 10 12 16 Surface C to surface A 0.02 Parallelism Surface D to surface B 0.02 M5 x 0.8 M3 x 0.5 Port size Surface C to surface A 0.004 Traveling parallelism Fluid Air Surface D to surface B 0.004 Action Double acting M dimension tolerance 0.05

2/3 Port Valve

VN VNA01, 11 (N.C.)