CJ2

M5 x 0.8 Piping port M5 x 0.8 S + Stroke Z + Stroke Rod end nut Rod End Nut 2-LC Mounting hole Material: Iron Applicable bore (mm) 10 16 B H C d Part no.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VK VZ1120--M5 (Piping: 4 x 1 m) VZ VF AS1301F-M5-04/AN120M5 AS1301F-M5-04/AN120-M5 Speed controller/Silencer VFR

15

x 0.8 10 70 50 3.5 22.5 78 M3 x 12 1.5 M5 x 22 3 14 17.7 NY M4 x 0.7 8 70 50 3.5 22.5 78 M3 x 12 3.6 M5 x 22 3 14 17.7 NX M5 x 0.8 10 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NW M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 9 11.7 NV M4 x 0.7 8 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NU M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 11 11.7 NT M5 x 0.8 10 70 50 3.5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 10-SY3000 SY3000-39-2A(-Q) 10-SY5000 SY5000-39-16A(-Q) 10-SY7000 SY7000-39-16A(-Q) Series Assembly part no.

Vacuum Pad

Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon

Vacuum Pad

Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon

Vacuum Pad

Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon

Vacuum Pad

Dimensions: With Adapter ZP2-TB02EU-A5 ZP2-TB04EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 2.5 3.5 (10) (10) 4 4 1.5 1.2 0.5 0.5 4 2 4.8 2.6 ZP2-TB06EU-A5 ZP2-T08EU-A5 Width across flat 7 (Hexagon) Width across flat 7 (Hexagon) M5 x 0.8 M5 x 0.8 3.5 2.5 3.5 2.5 (10) (10) 4 4 1.5 6 6.7 1.5 0.5 0.5 8 9 ZP2-T15EU-A5 Width across flat 7 (Hexagon

KQ2

(mm) Connection thread R Effective area (2) (mm2) Nylon Urethane <M5> (1) A Mass (g) D1 L1 L2 M D2 Model L1 Applicable tubing KQ2W23-M5 30 8 31 10 M5 x 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 3.2 1 8 KQ2W23-01S KQ2W23-02S 10 14 D1 D1 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 36.6 32 38.5 M5 x 0.8 11 3.0 3.0 8 10.4 D2 4 1 8 16 4.0 4.0 23 14 10 10 L2 1 4 KQ2W04-02S 43 42.5 38 11 26 KQ2W06-M5

One-touch Fittings

3/16 R1/8 KQ2H05-01S1 Male connector Operating Environment 4 M3 x 0.5 KQ2F04-M31 4 M5 x 0.8 KQ2F04-M51 6 M5 x 0.8 KQ2F06-M51 1/8 10-32UNF KQ2F01-321 5/32 10-32UNF KQ2F03-321 1/8 M3 x 0.5 KQ2F23-M31 1/8 M5 x 0.8 KQ2F23-M51 Warning 1.

CRBU

(mm) Y Lmax (mm) X Q X-1.5 X-1.5 X-1.5 X-2.5 (mm) Y Q Y-1.5 Y-1.5 Y-1.5 Y-2.5 Size 10 15 20 30 Size 10 15 20 30 Size 10 15 20 30 Lmax Lmax Y-1.5 Y-1.5 Y-1.5 Y-2.5 M3 M3, M4 M3, M4, M5 M3, M4, M5, M6 M3 M3, M4 M3, M4, M5 M3, M4, M5, M6 2 to 8 3 to 9 3 to 10 3 to 13 15.5 to 14 17.5 to 18 15.5 to 8 17.5 to59 19 to 20 11 to 22 19.5 to 10 11.5to 13 1.2-20 Series CRBU Mode to Order Specifications

Micro Mechanical Valve Series VM1000

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F .O.F .* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

Base Mounted Metal Seal/Rubber Seal Series VQ

fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 31 50 60.5 53 75 85.5 64 87.5 98 75 100 110.5 86 112.5 123 97 125 135.5 108

Metal Seal/Rubber Seal Series VQ Body Ported

C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L L1 L2 L3 31 50 60.5 75 100 110.5 53 75 85.5

SYJ3000/5000/7000

[48.5] + 35.6 28.5 26.1 R1 P R2 R1 P R2 13 5 10 10 10 M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): SYJ3140-L-M5 M8 connector (WO): SYJ3140-WO-M5 M plug connector (M): SYJ3140-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14

AC

10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4

ZP

Thread dia. 4, 6 tube 4, 6, 8 tube 6, 8 tube Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x

Free Mount Cylinder

7 7 9 10 11 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 9 12 17 20 22 29 15 16.5 16.5 19 21.5 23 10 10 11.5 12.5 13 12.5 18 21 26 29 33 42 10 11 14 16 20 24 17 18 25 30 38 48 7 10 11 12 15.5 19.5 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 Y Without auto switch With auto switch Bore

KR

(mm) <M5, M6> <M5, M6> A Weight (g) L D M Model Soft nylon Urethane KAH23-M5 17 8.5 14 13 2.1 M5 x 0.8 M6 x 1 7 17.5 12.5 8.5 3.4 2.9 4 Applicable tubing 1 8 KAH23-M6 KAH23-U01 8 10 3.2 KAH04-M5 17 M5 x 0.8 M6 x 1 9.5 14 13 2 4 4 8 KAH04-M6 17.5 4 1 8 KAH04-U01 13.5 18.5 5 14 10 10 16 5.6 5.6 K 1 4 KAH04-U02 16.5 10.5 10 KAH06-M5 18.5 M5 x 0.8 M6 x 1 15 14 4 4 11.5 3 10 KAH06-M6 19 Connection

Table of Contents

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B 10 10 A B 14.4 10 With across flats 7 M3: M3 x 0.5 M5: M5 x 0.8 A PSE54-M5 PSE54-M3 PSE54-R06 PSE54-R04 A A 11.5 10.8 6 4 B 3.5 3 B 20 18 Common dimensions PSE54-IM5 18 3000 13 9.6 8.7 9 4 M5 x 0.8 PSE5401 N01 PSE54-IM5H 8.7 13 3.4 01: R 1/8 N01: NP T1/8 3 8 With