AS-FG/ASD-FG

4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02 NPT1/4 40, 50, 63 AS321FG-N02 AS331FG-N03 NPT3/8 40, 50, 63 AS321FG-N03

V

R 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 M O U N T I N G T H R E A D P A D T Y P E Symbol Thread Dia 2~8 10~16 40~50 20~32 U Flat C Flat with Rib (Not 2,4,6,8) D Deep (10,16,25,40) B Bellows (Not 2,4) A5 M5X0.8 Male Thread A6 M6X1 A8 M8X1 V A C U U M E N T R Y Symbol Port Size 2~8 10~16 40~50 20~32 P A D M AT E R I A L 04 4 tube OneTouch Tube Fitting N Nitrile

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

74 60 820 263 86 70 0.05 AN300-03 3 8 AN400-04 1 2 0.02 AN500-06 3 4 0.01 AN600-10 1 1 1 0.005 AN700-12 1 4 AN800-14 1 2 AN900-20 0.002 50 200 1000 5000 20 100 500 2000 10 50 10 Construction/Parts/Dimensions Air flow (l/min (ANR)) AN500 to 900 AN200 to 400 Noise Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement

E-P HYREG ® Series VY1

be mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

HRX-OM-R016

0.2 20 0.1 10 Availavel area 0.0 0 0 5 10 15 20 25 Circulating fluid flow[L/min] Fig. 9-9 Pump capacity(HRS030--20-MT) 9.7 Required facility water flow (for water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature[] *The amount of the facility water for the operation with rated circulating fluid, cooling capacity which is described

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

HRX-OM-O021

[] 60Hz 50Hz Fig. 9-5 Heating capacity(HRS050-A-20-(BJM)) 9.5.2 HRS050-W-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 5 20 25 32 40 1500 1500 5 20 25 32 40 Heating capacity [W] Heating capacity [W] 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz Fig. 9-6 Heating capacity(HRS050-W-20

HRX-OM-R005

0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature[] *The amount of the facility water

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Recommended flow rate Note) (l/min (ANR)) IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" Internal capacity (cm3) 1.7 Mass (g) ZA Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 4.3 1.7 ZR Metric size Easy installation

HRX-OM-R026

-A-20. 9-10 9.4.2 HRSH090-A-40. 9-10 9.4.3 HRSH090-W-20-HRSH090-W-40. 9-11 Pump capacity . 9-12 9.4.4 HRSH090-A-20/40-HRSH090-W-20/40. 9-12 9.5 Types of hazard labels . 9-13 9.5.1 Locations of Hazard Labels . 9-14 9.6 Compliance standard . 9-15 9.7 Sample DoC. . 9-16 9.8 Daily Check Sheet . 9-17 Chapter 10 Product Warranty . 10-1 HRSH Series HRX-OM-R026 Contents HRSH Series HRX-OM-R026 Chapter

Base Mounted Metal Seal/Rubber Seal Series VQ

Note) Types with 10, 16, or 20 pin are also available. Refer to page 2-4-215 for details.

HRX-OM-R039

-(T) . 8-7 8.4.2 HRSE018-A-10-(T) . 8-7 8.4.3 HRSE012-A-20/23-(T) . 8-7 8.4.4 HRSE018-A-20/23-(T) . 8-8 8.4.5 HRSE024-A-20/23-(T) . 8-8 8.5 Pump capacity . 8-9 8.5.1 HRSE012/018-A-10 . 8-9 8.5.2 HRSE012/018/024-A-20/23 . 8-9 8.5.3 OPTION-T (HRSE012/018-A-10-T). 8-10 8.5.4 OPTION-T (HRSE012/018/024-A-20/23-T) . 8-10 8.6 Sample DoC.

New

AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 Air operated type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 VXF(A)25BA(B) VXF(A)26BA(B) VXF(A)26CA(B) VXF(A)26DA(B) VXF(A)27BA(B) VXF(A)28BA(B) Note) Spring is shipped together with the product, but not assembled. 10 Series VXF2 Dimensions: Direct piping type VXF21A<<

13

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 5 7 10 2 4 4 7 9 11 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 10 11 13 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 14 14 13 20 18 15 18 21 26 33 12 13 11 17

CL

43.4 11 13 15 18 28 28 28 30 14 16 20 22 16 20 22 30 10 10 10 10 5.5 5.5 6.6 6.6 3.2 3.2 4.5 4.5 25 30 35 40 52.5 39.8 48 57.5 49.4 59.4 66 58.4 71.4 (Hole dia.)

HRX-OM-W058

-R . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS018-A-20--R . 9-7 9.4.2 HRS030-A-20--R . 9-7 9.5 Heating capacity . 9-8 9.5.1 HRS018-A-20-R, HRS030-A-20-R . 9-8 9.6 Pump capacity. 9-9 9.6.1 HRS018-A-20-R, HRS030-A-20-R . 9-9 9.6.2 HRS018-A-20-T-R, HRS030-A-20-T-R . 9-9 9.7 Compliance . 9-10 9.8 Sample DoC. . 9-11 9.9 Daily Check Sheet . 9-12 Chapter 10 Product Warranty . 10-1 HRS-R Series HRX-OM-W058

Combination Cylinder

12 16 20 25 15 18 25 31.5 35.5 29.5 38 49 61 64 32 40 40 52 52 10 10 10 14 14 85 95 102 113 124 15 17 17 21 21 26 27 26 30 31 54 59 67 72 76 8 11 11 13 16 10 13 18 23 25 10 12 15 17 19 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 +0.3 +0.1 CB +0.3 +0.1 +0.3 +0.1 CV/MVG +0.3 +0.1 Bore (mm) CXW W/o rod boot W/ rod boot J K KA L LZ MM N

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

E-P HYREG ® Series VY1 1

Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4