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Cassette base i sssv ll16ss E D -trEltr s",i""l | | | If ":rr' | | | E . ' . , | | | Sl unit specification.'-l I .-r DIN rail length Valve :l'"T,T;'fi":il"** :lloo,,"*,.s oec,,cl:on I l";]l;il"'fl:,^ii,lli' ffi!";:lffi | l ooraro barefe,.J r^Kb\,:r. I E Jr o.6roonoo(oosscte I =r..r'r,i;F,ro*"r,rewlrn+sy.:4IE19"'utrqr"Llliillilillii|l a r o ^ : r . . !

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type F lsed keep the dhaust port ' o r r o r r q n o f F c r . o _ d ' * _ s " e ' o r o ' e r q d r Nole 1) Dolbe wrng specl caton Singe, doibe a.d 3 posilion soenoid E@s can be lsed on a manrfodslatons Useolasrnqsolenodlvi sutrn an unused onlrolsignal li th$ rs notdesred orderwrlh aspecilied layout No1e2)speciedlayoul: ndlelvnn9specf catonsonamanlold sp6ifilio. sh@t (No1e thal doube and

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:..1 : 4 0 0 . 1 > -90 . : : , ' : r ' ] t r , , l L : l l . l l P N 1 N E G c o P 1 2 Maximum number ot stations 20 Also available SY manifold with gateway type Sl unit and is capable to handle 128 UO points.

Series AP500

Ports 2 ports 3 ports 4 ports Code 2PW 3PW 4PW Porting Configuration r r e 1) Refer to gauge guide (P.94) for gauge specifications. Pressure gauge unit 2) w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port AP1001S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 2PW 3PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable.

Series VQ Base Mounted Metal Seal/Rubber Seal

R port. 2.

AZ1000

Unit psig/bar MPa Code r e No code MPA Sample Order Number Port qIN wOUT eGauge port (Inlet) rGauge port (Outlet) w q AZ1402TS e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 3) Pressure gauge unit MPa or psig/bar selectable.

Vacuum

Applicable valve: NvJr(n (N.C.) / NzxloGKi 6)@@O-F SpcQ| l,/ZXl-Sl Spscs 1 .1, .r"iF. stde .orri"tg) 9 i!

Vacuum

enie MffiIE Applicable valve: NvJr(n (N.C.) / NzxloGKi 6)@@O-F SpcQ| l,/ZXl-Sl Spscs 1 .1, .r"iF. stde .orri"tg) 9 i!

SL5200

FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 L L MPA MPA 2PW 3PW 4PW 10 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Other range available.

Series AK1000

Refer to gauge guide (P.94,95). t t r Sample Order Number Port w w w q q q t AK1002S e q 4 4 4 4 4 w 4 4 4 4 4 r 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA 1 w w q q 2) Pressure gauge unit MPa or psig/bar selectable.

Series AP3500

q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

SQ1000/2000

O-ring R R R P R P SUP passage shut off SUP/EXH passages shut off EXH block plate Approx. 10 P R SSQ2000-B-R 9.2 5.2 When the exhaust from a valve interferes with other stations in the circuit, this is used between stations to separate exhausts. Also, it is used with an individual EXH spacer to shut off the exhaust of individual valves.

SMC Basic Pneumatics

U.S. gallon 9 r gram kg kilogl8m oz. ouhoo h-pdd Table 3.3b Conversion of Units P N E u r i t a r t c T E c H N o L o c Y P R E S S U R E ll should b noted that the Sl unit of pressure is th pascal (Pa) I Pa = I N/m2 (Newton per square merer) This unil is extremely small and so, to avoid huge numbers in practice, an agreement has been made to use lhe bar as a unit ot 100,000 Pa. 100,000

%silltr

U.S. gallon 9 r gram kg kilogl8m oz. ouhoo h-pdd Table 3.3b Conversion of Units P N E u r i t a r t c T E c H N o L o c Y P R E S S U R E ll should b noted that the Sl unit of pressure is th pascal (Pa) I Pa = I N/m2 (Newton per square merer) This unil is extremely small and so, to avoid huge numbers in practice, an agreement has been made to use lhe bar as a unit ot 100,000 Pa. 100,000 Pa

Table of Contents

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

KT10

P F H J L N P R Option Code Specification Standard (Cv: 0.06) High flow (Cv: 0.12) No code HF O-ring material 1) Not available for material code B.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26

Series AP3100

q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

O

i vi t y Sensi t i vi t y Sharp D ul l Set t i ng of sensi t i vi t y SL. 0 SL. 1 SL. 2 Sw i t ch out put The f ol l ow i ng operat i on t ypes are avai l abl e by set t i ng P_1 and P_2.

O

i vi t y Sensi t i vi t y Sharp D ul l Set t i ng of sensi t i vi t y SL. 0 SL. 1 SL. 2 Sw i t ch out put The f ol l ow i ng operat i on t ypes are avai l abl e by set t i ng P_1 and P_2.