Stations: 7 Stations, Left Common Air Pressure Supply Port: w/o Fitting, M5 x 0.8, Right Common Air Pressure Supply Port: w/o Fitting, M5 x 0.8

Stations: 7 Stations, Left Common Air Pressure Supply Port: ø6, Straight, Right Common Air Pressure Supply Port: ø6, Straight

Process Gas Diaphragm Valve

Maximum operating pressure 125 psig (0.9 MPa) Size Port AZ3 AZ4 Connections Code 2P 542 2P 2PW 2PW 1/4 inch face seal (Male) 1) 1/4 inch face seal (Female) 1/4 inch tube weld 3/8 inch face seal (Male) 1) 3/8 inch face seal (Female) 3/8 inch tube weld 1/2 inch tube weld MV4 FV4 TW4 MV6 FV6 TW6 TW8 Material Body material 316L SS Code S Ports Code Ports Connection Machined Welded 2P 2PW

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Body side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O. Sub-plate side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O.

VZA200/400

Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Body side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O. Sub-plate side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O.

VZA200/400

Rc 1/8 M5 x 0.8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 0.49 0.11 2.2 0.57 0.19 2.4 N.C. M5 x 0.8 Sub-plate side 0.49 0.11 2.2 0.57 0.19 2.4 N.C. M5 x 0.8 Body side 0.45 0.32 1.9 0.57 0.19 2.4 N.O. M5 x 0.8 Sub-plate side 0.45 0.32 1.9 0.57 0.19 2.4 N.O.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

V100

Material Aluminum die-casted Note Platinum silver Black Black Description Material Description No. q w e r t y DXT201-2-1P Piston plate Body 1/4 1/8 Sub-plate Aluminum die-casted u DXT201-2-2P Resin Aluminum die-casted Solenoid assembly O-ring Epoxy/Stainless steel NBR End cover Piston i o 13 x 11 x 1 Common with VZ100 Resin Spool valve assembly Thread type Sub-plate part no.: DXT201-2P

CG5-S

R V Front flange type (F)/CG5FNS GA GB FT 2P H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C 0.1 S + Stroke ZZ + Stroke H M FX 0.15 B (mm) Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 to 400 22 19.5 17 50 18.5 10 36 5.5 6 18 12

CEx-OMQ0013

*2P.26 7-3-6 29 ( / MIN50m sec(*2) + + (*1) (*1) END (*1) () ) RUN *10.2secmax. *2P.26 7-3-6 30 ( / + + (*1) (*1) END +-ON *10.2secmax. 31 ( MIN50m sec(2) / + END POWER ON RUN *1P7t *2P.26 7-3-6 32 ( / ( (1) (1) END (1) *10.2secmax. 33 ( / ( END ON OFF *1P7t *20.2secmax. 34 No1. No2. ( / MIN50m sec(*2) No1 No2 ( 1 END LCD ON LCD OFF LCD ON ON 1 *10.2secmax

Diaphragm Valve for Ultra High Purity

Code Maximum operating pressure 125 psig (0.9 MPa) Size Port AZ3 AZ4 Connections Code 2P 542 2PW 2PW 2P 1/4 inch face seal (Male) 1) 1/4 inch face seal (Female) 1/4 inch tube weld 3/8 inch face seal (Male) 1) 3/8 inch face seal (Female) 3/8 inch tube weld 1/2 inch tube weld MV4 FV4 TW4 MV6 FV6 TW6 TW8 Material Body material 316L SS Code S Ports Code Ports Connection Machined Welded

Table of Contents

Order the seal kit, based on each bore size. 4 6 Series CU Dimensions: Double Acting, Single Rod 6, 10 2-M5 x 0.8 Rod end nut 2P through 2P through Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto switch 4T counterbore S + Stroke Z + Stroke 16 to 32 2P through

Free Mount Cylinder

Order the seal kit, based on each bore size. 4 6 Series CU Dimensions: Double Acting, Single Rod 6, 10 2-M5 x 0.8 Rod end nut 2P through 2P through Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto switch 4T counterbore S + Stroke Z + Stroke 16 to 32 2P through

PA300/500/700

(Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Tightening Torque for Mounting Screw VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6

VP300/500/700

(Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) Mounting Screw Tightening Torques M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm VP300-17-1 VP344 SF4--50 VP500-17-1 VP544 VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544 1/4 3/8 VP344 1/8 1/4 3 5 7 P F N T VP344 VP544 VP744 Rc G NPT NPTF Symbol 1 2 4-8-5 6 Series

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6 Nm

VPA4

(Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6 Nm

AK1000

Refer to gauge guide (P.94,95). t t r w w w q q q Sample Order Number Port t r q 4 4 4 4 4 w 4 4 4 4 4 AK1002S e 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA w w q q 1 2) Pressure gauge unit MPa or psig/bar selectable.

BP1000

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications Operating Parameters BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to

Compact

For details about fixing method, refer to Wiring/Cables in the Electric Actuators Precautions. ( ) NPN * Produced upon receipt of order (Robotic cable only) LEH 2P PNP 1N LECP1 (Programless type) NPN 1P PNP LEY -X5 MJ LECPMJ (CC-Link direct input type) 11LEFS !0 I/O cable length*1, Communication plug !