Stations: 6 Stations, Left Common Air Pressure Supply Port: ø4, Straight, Right Common Air Pressure Supply Port: ø4, Straight

Stations: 6 Stations, Left Common Air Pressure Supply Port: ø6, Elbow, Right Common Air Pressure Supply Port: ø6, Elbow

CEx-OMQ0013

*2P.26 7-3-6 29 ( / MIN50m sec(*2) + + (*1) (*1) END (*1) () ) RUN *10.2secmax. *2P.26 7-3-6 30 ( / + + (*1) (*1) END +-ON *10.2secmax. 31 ( MIN50m sec(2) / + END POWER ON RUN *1P7t *2P.26 7-3-6 32 ( / ( (1) (1) END (1) *10.2secmax. 33 ( / ( END ON OFF *1P7t *20.2secmax. 34 No1. No2. ( / MIN50m sec(*2) No1 No2 ( 1 END LCD ON LCD OFF LCD ON ON 1 *10.2secmax

Diaphragm Valve for Ultra High Purity

Code Maximum operating pressure 125 psig (0.9 MPa) Size Port AZ3 AZ4 Connections Code 2P 542 2PW 2PW 2P 1/4 inch face seal (Male) 1) 1/4 inch face seal (Female) 1/4 inch tube weld 3/8 inch face seal (Male) 1) 3/8 inch face seal (Female) 3/8 inch tube weld 1/2 inch tube weld MV4 FV4 TW4 MV6 FV6 TW6 TW8 Material Body material 316L SS Code S Ports Code Ports Connection Machined Welded

Table of Contents

Order the seal kit, based on each bore size. 4 6 Series CU Dimensions: Double Acting, Single Rod 6, 10 2-M5 x 0.8 Rod end nut 2P through 2P through Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto switch 4T counterbore S + Stroke Z + Stroke 16 to 32 2P through

Free Mount Cylinder

Order the seal kit, based on each bore size. 4 6 Series CU Dimensions: Double Acting, Single Rod 6, 10 2-M5 x 0.8 Rod end nut 2P through 2P through Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto switch 4T counterbore S + Stroke Z + Stroke 16 to 32 2P through

PA300/500/700

(Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Tightening Torque for Mounting Screw VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6

VP300/500/700

(Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) Mounting Screw Tightening Torques M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm VP300-17-1 VP344 SF4--50 VP500-17-1 VP544 VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544 1/4 3/8 VP344 1/8 1/4 3 5 7 P F N T VP344 VP544 VP744 Rc G NPT NPTF Symbol 1 2 4-8-5 6 Series

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6 Nm

VPA4

(Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) VPA344 VP300-17-1 VP300-24-4 M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6 Nm

AK1000

Refer to gauge guide (P.94,95). t t r w w w q q q Sample Order Number Port t r q 4 4 4 4 4 w 4 4 4 4 4 AK1002S e 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA w w q q 1 2) Pressure gauge unit MPa or psig/bar selectable.

BP1000

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications Operating Parameters BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to

Compact

For details about fixing method, refer to Wiring/Cables in the Electric Actuators Precautions. ( ) NPN * Produced upon receipt of order (Robotic cable only) LEH 2P PNP 1N LECP1 (Programless type) NPN 1P PNP LEY -X5 MJ LECPMJ (CC-Link direct input type) 11LEFS !0 I/O cable length*1, Communication plug !

BP1000

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4

Table of Contents

Description Regenerative absorption unit power output (negative) Regenerative absorption unit power output (positive) Max. 6mA External power supply 24V DC N 1 Resistor R P B + 5 Input Temperature sensor (NC) Control equipment (PLC, etc. ) Connector: Molex 5258-02 Pin: Molex 5167PBTL Crimping tool: JHTR2445A LC1 connection cable (0.5m) LC1 connector (preassembled) (2P) 6 Regenerative

Dedicated Controller

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17 38 Interface cover 12.5 12.5 80 29 CN3 communication connector (D-sub 9P) 75 244 Mounting bracket 196 24 24 With regenerative absorption unit LC1-1HV CN6 regenerative absorption unit connector (Molex 2P) TB power terminal CN5 motor power line connector

Electric Actuators

encoder signal line connector (halfpitch 20P) CN1 control input/output connector (halfpitch 26P) Indicator light 23 35.5 29 42.5 120 90 SMC LINIAR ACTUATOR CONSTRUCTION SYSTEM CONTROLLER 17 38 80 29 Interface cover 12.5 12.5 CN3 communication connector (D-sub 9P) 75 244 Mounting bracket 24 24 196 With regenerative absorption unit LC1-1BV CN6 regenerative absorption unit connector (Molex 2P

Electric Actuator with Integrated Guide

Description Regenerative absorption unit power output (negative) Regenerative absorption unit power output (positive) Max. 6mA External power supply 24V DC N 1 Resistor R P B + 5 Input Temperature sensor (NC) Control equipment (PLC, etc. ) Connector: Molex 5258-02 Pin: Molex 5167PBTL Crimping tool: JHTR2445A LC1 connection cable (0.5m) LC1 connector (preassembled) (2P) 6 Regenerative

VZ100/300/500

Material Aluminum die-casted Note Platinum silver Black Black Description Material Description No. q w e r t y DXT201-2-1P Piston plate Body 1/4 1/8 Sub-plate Aluminum die-casted u DXT201-2-2P Resin Aluminum die-casted Solenoid assembly O-ring Epoxy/Stainless steel NBR End cover Piston i o 13 x 11 x 1 Common with VZ100 Resin Spool valve assembly Thread type Sub-plate part no.: DXT201-2P

Table of Contents

VS4040-S-03 VS4040-S-04 DXT131-15P-06 DXT131-15P-10 DXT132-15-2P-12 DXT132-15-2P-14 XT021-9 DXT132-16 M6 x 25 with washer M8 x 35 3 8 1 2 3 4 VP450 Aluminum alloy Sub-plate !0 1 1 VP470 1 1 4 1 2 VP450 VP470 VP450 VP470 in part numbers are the same symbol for the thread type in How to Order. Gasket !1 Hexagon socket head screw VT3112-00G !2 Thread for mounting valve.