Table of Contents

-20-A ZS-20-5A55 Note) When ordering a switch with 5 m lead wires, enter the part numbers for both a switch without connector and lead wires with connector.

Air Slide Table

D A [mm] Rubber Stopper A Model A B C D E MXQ6(A) 41.5 27 22 25 20 MXQ8(A, C) MXQ6B 41.5 27 21 25 19 MXQ12(A, C) MXQ8B 46.5 28 21 27 20 MXQ16(A) MXQ12B 51.5 30 21 28 20 MXQ20(A) MXQ16B 58.5 32 22 31 21 MXQ25(A) MXQ20B 65.5 34 22 33 21 Cap bracket RJ-X2300 A cap bracket is mounted to lengthen the A dimension.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

P Q PF2M7mW-C4/C6/C8/N7(-L) A D A D 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 3 3 C 18 C OUT IN 18 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 2 x 3.4 OUT IN 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 68 2 x 3.4 68 28 [mm] 28 Model A C D P PF2M705/710W-C4(-L) 86.2

Proposals for Energy Saving

(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..

PSxx-OMG0001CN

(mm 0.81.0 ZS-28-C 24-26 0.14-0.2 1.01.2 ZS-28-C-1 1.21.6 ZS-28-C-2 23 0.1-0.5 1.151.35 ZS-28-CA-4 1.01.2 ZS-28-C-3 20-22 0.3-0.5 1.21.6 ZS-28-C-4 1.62.0 ZS-28-C-5 SMC 3M ZS-28-C 37104-3101-000FL 1-1473562-4 ZS-28-C-1 37104-3122-000FL ZS-28-C-2 37104-3163-000FL ZS-28-CA-4 2-1473562-4 ZS-28-C-3 37104-3124-000FL ZS-28-C-4 37104-3165-000FL ZS-28-C-5 37104-2206-000FL -12No.PS-OMG0001CN-H

Low Differential Pressure Sensor

Description ZS-28-A Note D Power supply/Output connection cable Mounting screw (M3 x 8L) (accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

PSE550/300

Bracket ZS-30-A With M3 x 5L (2 pcs.) Connector for PSE300 ZS-28-C 1 pc. A Note) The bracket is unassembled in the factory, but is included with the shipment.

CATALOG

21 7 59 1/2 1/4 KQL13-35S 17.46 21.7 17 28 31.5 36.5 22 9 28 1/2 3/8 KQL13-36S 17.46 21.7 17 28 33.5 38.5 22 9.6 36 1/2 1/2 KQL13-37S 22.23 21.7 17 28 37.5 40 22 9.6 62 P R O D U C T S E L E C T O R H E X A G O N S O C K E T H E A D M A L E C O N N E C T O R : K Q S ( K Q 2 S ) Applicable Thread Model H D L A M Effective Weight Tube OD R(PT) (Hex) 0rifice (mm2) (g) (mm) Nylon Urethane 4

PSxx-OMU0008CN

ON () (n1Ln1H)ON (35 ) hysteresis 35 (0FF)(ON)(OFF)(ON) 5R.D.(5) () (01 MPa 0.001 MPa 1/1000) () () F // () -15No.PS-OMU0008CN-D (20 ) () 0.50.05Nm ,, <> A(ZS-46-A1) 38L A <> C(ZS-46-E) C 310L -16No.PS-OMU0008CN-D <> (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -17No.PS-OMU0008CN-D <> AB (ZS-35-B) +(ZS-35-E) B A -18No.PS-OMU0008CN-D 812 Nm -19No.PS-OMU0008CN-D () TU0425( 4 2.5) -20No.PS-OMU0008CN-D

PSxx-OMM0006CN

A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45

PSxx-OMU0002CN

5) () (01 MPa 0.001 MPa 1/1000) () () F // () -14No.PS-OMU0002CN-D (38L(2 ) 0.50.05 Nm ,, A(ZS-46-A1) 38L A B(ZS-46-A2) 38L B -15No.PS-OMU0002CN-D (a)(a) (b) (ZS-46-B) +(ZS-46-D) () 90 -16No.PS-OMU0002CN-D (-M5) 1/61/4 11.5 Nm (ZS-46-N) -01-N01 23 35 Nm -C4H-C6H-N7H-C4L-C6L-N7L 1/61/4 11.5 Nm -17No.PS-OMU0002CN-D -18No.PS-OMU0002CN-D FG () () No.

Digital Flow Switch

Option Note ZS-28-CA-4 Sensor connector For PF3A7H ZS-46-A1 Bracket A Tapping screw: Nominal size 3 x 8 L (2 pcs.) ZS-46-A2 Bracket B Tapping screw: Nominal size 3 x 8 L (2 pcs.)

IZ-OMU0031-CN

L(2) ZS-27-01 -7No.IZ*-OMU0031 LCD (OUT1)() (OUT2)() (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 ON/OFF ON/OFF -8No.IZ*-OMU0031 (2 m)ZS-28-A (1 )ZS-28-C 0.140.2mm 0.81.0 (M3X5 L(2))ZS-28-B (M3X8 L (2 ))ZS-27-C (M38 L(2))ZS-27-D ZS-27-01 -9No.IZ*-OMU0031 M3X5 L(2) 0.50.7 Nm M3X5L (ZS-28-B) M3X5L M3X8 L(2 ) M3X8L ( ZS-27-01) (ZS-27-C) 90 2 -10No.IZ*-OMU0031 ,FG 20mm () SMC 3M

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

PS-OMH0005CN

(mm 2) (mm) SMC(1) 0.81.0 ZS-28-C 1.01.2 ZS-28-C-1 26-24 (28) 0.14-0.2 (0.08) 1.21.6 ZS-28-C-2 1.01.2 ZS-28-C-3 1.21.6 ZS-28-C-4 22-20 0.3-0.5 1.62.0 ZS-28-C-5 1 (DC+) 2 3 (DC-) 4 (IN15 V) A A -15No.PS-OMH0005CN-D No 8 7 CH4_OUT1 6 CH3_OUT1 5 CH2_OUT1 4 CH1_OUT2 3 CH1_OUT1 2 DC(-) 1 DC(+) -16No.PS-OMH0005CN-D ( ) ( ZS-26-A) PSE200-(M)NPN 5 +1 Max. 30 V80 mA 1 V DC(+) CH1_

PF-OMN0011_C

/IN (/15 V ) 3 DC() 4 INPUT (15 V ) COPY OUT2 OUT1 DC() DC() -16No.PF-OMN0011CN-C ,FG () SMC(1) ZS-28-CA-4() 1.151.35 ZS-28-C-1 1.01.2 AWG23 1.14ZS-28-CA-4 1 2 3 4 PF3W5 M8 A A ,LLL -17No.PF-OMN0011CN-C NPN2 PF3W30A PNP2 PF3W30B DC(+) DC(+) OUT1 OUT1 OUT2 OUT2 DC(-) DC(-) / / Max.28 V80 mA 1 V Max.80 mA 1.5 V NPN PF3W30C NPN PF3W30D PNP PF3W30E PNP PF3W30F

EXxx-OMZ0016

(mm SQ) ZS-28-C-1 24~26 0.14~0.2 1.0~1.2 Yellow ZS-28-C-2 1.2~1.6 Orange ZS-28-C-3 22~20 0.3~0.5 1.0~1.2 Green ZS-28-C-4 1.2~1.6 Blue ZS-28-C-5 1.6~2.0 Grey ZS-28-CA-1 0.6~0.9 Orange ZS-28-CA-2 0.9~1.0 Red 0.1~0.5 ZS-28-CA-3 1.0~1.15 Yellow ZS-28-CA-4 1.15~1.35 Blue ZS-28-CA-5 1.35~1.6 Green -98No.EX-OMZ0016-C (5) NFC reader/writer EXW1-NT1 This set includes an NFC reader/writer and a USB

PSxx-OMS0004CN

(0500KPa) (1~5V) 01 R1/8(M5) 28 (4~20mA) 02 R1/4(M5) M12 3m ZS-37-A 1 M12 3m ZS-37-B 1 ZS-28-CA-4 1 Rc1/4 ZS-31-X175 1 Rc1/8 ZS-31-X188 1 -8No.PS-OMS0004CN-D M12 C3604+AI203(96)FKM (Nm) R1/8 35 R1/4 812 -9No.PS-OMS0004CN-D PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMS0004CN-D PSE20 PSE30 PSE31 PSE570PSE573PSE574PSE570--28 PSE573--28 PSE574--28 PSE570PSE573

PSxx-OMS0006CN

ZS-46-A1) 3X8L A B(ZS-46-A2) 3X8L B -14No.PS-OMS0006CN-G (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -15No.PS-OMS0006CN-G (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4H-C6H-N7H-C4L-C6L-N7L 1/61/4 1~1.5Nm -16No.PS-OMS0006CN-G -17No.PS-OMS0006CN-G ,FG -18No.PS-OMS0006CN-G Z/ISE20(F)-N NPN 1 Max.28 V80 mA 1 V -P PNP 1 Max.80 mA 1 V -19No.PS-OMS0006CN-G [] 3 0.2 [] / OUT1 OUT1 [F10]30 ()

ZR

~7kgf/cm2 SOL.a SOL.b VJ3233-X17 PRESS. 2.5~7kgf/cm2 SOL.a SOL.b B B A A Adapter B Adapter B B B A A L2 L1 Adapter D Adapter D 19 31 19 31 H SET L H SET L 4 Suction filter Suction filter Vacuum pressure switch Pressure setting trimmer Vacuum pressure switch Pressure setting trimmer Individual spacer Individual spacer 28 52 28 52 20 31 31 32 74 44 63 Release valve (SOL.c) Vacuum valve (SOL.a