Table of Contents

-20-A ZS-20-5A55 Note) When ordering a switch with 5 m lead wires, enter the part numbers for both a switch without connector and lead wires with connector.

Air Slide Table

Stroke A [mm] Shock Absorber/RJ Model A B C D E Applicable shock absorber unit model MXQ12(A, C) MXQ8B 47.3 29 19 28 18 RJ0805U-X2300 MXQ16(A) MXQ12B 52.8 31 19 30 18 RJ1006U-X2300 MXQ20(A) MXQ16B 52.8 23 11 26 14 RJ1007HU-X2300 MXQ25(A) MXQ20B 77.1 46 31 45 30 RJ1410U-X2300 [mm] Metal Stopper Model A B C D E MXQ6(A) 40 25 20 23 18 MXQ8(A, C) MXQ6B MXQ12(A, C) MXQ8B 45 27 20 26 19 MXQ16(

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Front protective cover (ZS-26-01) Panel mount (ZS-26-B) Claw Claw 2 x M3 x 8L Tighten screws 1/4 to 1/2 turn after the heads are flush with the panel. When using 48 conversion adapter 48 conversion adapter (ZS-26-D) (PSE300T) Figure (b) Figure (a) 1.

Proposals for Energy Saving

(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..

PSE200

Wire core size AWG24-26 (0.14 to 0.2mm) AWG24-26 (0.14 to 0.2mm) AWG20-22 (0.3 to 0.5mm) AWG20-22 (0.3 to 0.5mm) PSE510, PSE530 ZS-26-E ZS-26-E-1 ZS-26-E-2 ZS-26-E-3 1.4 to 2.0 PSE521 1.0 to 1.4 PSE520 1.4 to 2.0 Refer to the following diagram for connecting Series PSE520 to the connector. Brown Black Blue N.C. 1 2 3 4 F.G.

PSE530/200

ZSP AWG24-26 (0.14 to 0.2 mm2) AWG24-26 (0.14 to 0.2 mm2) AWG20-22 (0.3 to 0.5 mm2) AWG20-22 (0.3 to 0.5 mm2) PSE510, PSE530 ZS-26-E ZS-26-E-1 ZS-26-E-2 ZS-26-E-3 ISA2 1.4 to 2.0 PSE521 1.0 to 1.4 IS PSE520 1.4 to 2.0 Refer to the following diagram for connecting Series PSE520 to the connector. ZSM PF2 Brown Black Blue N.C. 1 2 3 4 IF Data F.G.

PS-OMH0005CN

-26-B) +(ZS-26-01) 48(ZS-26-D) 48 (ZS-26-D) () (ZS-26-01) (ZS-26-B) 90 IP65(48IP40) 1/41/2 0.58 mm -13No.PS-OMH0005CN-D 2 -14No.PS-OMH0005CN-D FG () AWG No.

4-channel Flow Monitor (Remote type monitor unit)

Part number Description Remarks Weight ZS-26-A Power and output cable Length: 2 m 65 g ZS-26-B Panel mount adapter with waterproof seal, with Mounting screw (3.0 x 8 L) 2 pcs. 10 g ZS-26-C Panel mount adapter + front protective cover with waterproof seal, with Mounting screw (3.0 x 8 L) 2 pcs. 15 g ZS-26-01 Front protective cover only 5 g ZS-26-D 48 mm conversion adapter 5 g The panel which

Multi-channel Digital Sensor Monitor ( compatible)

Panel mount adapter ZS-26-B With set screw M3 x 8L (2 pcs.) and waterproof seal Panel mount adapter + Front protective cover ZS-26-C With set screw M3 x 8L (2 pcs.) and waterproof seal Front protective cover ZS-26-01 48 conversion adapter ZS-26-D It is an adapter for attaching PSE200A series in the panel cut size of PSE100 series. -8No.PS-OMW0012-C Summary of Product parts Names of individual

CATALOG

R Y T A B L E S E R I E S M S Q A 1 0 , 2 0 , 3 0 , 5 0 Model DA(h8) HD HB DB(h8) DC(h8) DD(h8) HA MSQA10 52.5 18.5 45 46 20 15 10 63 26 60 61 MSQA20 28 17 15.5 67 27 65 67 32 22 16.5 MSQA30 76 30 75 77 35 26 17.5 MSQA50 A L L D I M E N S I O N S E X C E P T F O R T H I S TA B L E A R E T H E S A M E A S F O R B A S I C M O D E L Courtesy of Steven Engineering, Inc. !

Multi Channel Pressure Sensor Controller

A unit label is attached. 2: Fixed unit for compound, vacuum, low pressure: kPa for positive pressure: MPa Option/Part number Description Part number Note Power and output lead wire ZS-26-A Length 2 m Connector for sensor lead wire ZS-28-C 1 pc.

Multi-channel Digital Sensor Monitor

Panel mount adapter ZS-26-B With set screw M3 x 8L (2 pcs.) and waterproof seal Panel mount adapter + Front protective cover ZS-26-C With set screw M3 x 8L (2 pcs.) and waterproof seal Front protective cover ZS-26-01 48 conversion adapter ZS-26-D It is an adapter for attaching PSE200A series in the panel cut size of PSE100 series. -8No.PS-OMW0005-C Summary of Product parts Names of individual

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

T V Panel mount adapter (For the type without a flow adjustment valve) Panel mount adapter (For the type with a flow adjustment valve) ZS-33-DM M12 conversion lead wire Connector M12 (Male) Brown q w e r Panel mount ZS-33-2J ZS-33-2JS Panel mount adapter White adapter S Brown Panel mount adapter B Panel mount adapter B Black White Blue Black Wiring diagram 3 4 Blue + Panel Panel 2 1 1 2 Mounting

PF-OMN0011_C

-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C.

Digital Flow Monitor

Remarks Sensor connector (For PFMB) ZS-28-C-1 Sensor connector (For PFMC and PF3A7) ZS-28-CA-4 Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs) Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5L 5 cores, 2 m Front protective cover ZS-27-01

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

Digital Pressure Switch ( compatible)

Nil (Rear piping) L (Bottom piping) Bracket A A1 ZS-46-A1 Bracket C A3 ZS-46-E B ZS-46-B Panel mount adapter E ZS-35-B D ZS-46-D Panel mount adapter + Front protective cover F ZS-35-E -9No.PS-OMX0002-A Accessories/Part numbers If an option is required independently, order with the following part numbers. Items Part No.

Digital Pressure Switch

Bracket A (Part No.: ZS-46-A1) Bracket C (Part No.: ZS-46-E) -16No.PS-OMU0009-D Mounting with panel mount adapter Mount part (a) to the front of the body and fix it. Then insert the body with (a) into the panel until (a) comes into contact with the panel front surface.

Sensor Monitor

Conductor size (mm2) Overall diameter (mm) Colour of cover SMC product No. (1 pc.) 0.8 to 1.0 Red ZS-28-C 26-24 0.14-0.2 1.0 to 1.2 Yellow ZS-28-C-1 (28) (0.08) 1.2 to 1.6 Orange ZS-28-C-2 1.0 to 1.2 Green ZS-28-C-3 22-20 0.3-0.5 1.2 to 1.6 Blue ZS-28-C-4 1.6 to 2.0 Gray ZS-28-C-5 Do not cut the insulator.

Digital Flow Switch (Remote type monitor unit)

Option Part number Remarks Panel mount adapter ZS-26-B Waterproof seal with screws Front protective cover + Panel mount adapter ZS-26-C Waterproof seal with screws Protective cover only ZS-26-01 Please order panel mount adapters etc. separately. Power supply/output lead wire ZS-40-W Lead wire length 2 m Sensor connector (e-con) ZS-28-CA-4 1 pc.