System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: N (w/o Pressure Sensor, Digital Pressure Switch for Vacuum), Connector: C1 (Common Wiring, Plug-in for Manifold), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female Thread: C (with Pump System PE Port

System: Vacuum Pump System for Manifold, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: Common Wiring, Plug-in for Manifold, Vacuum, V Port: Metric Size, ø6 One-touch Fitting, Bracket: w/o Option, Pump System PE Port Female Thread: with Pump System PE Port Female Thread, Individual

System: Vacuum Pump System for Manifold, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: Common Wiring, Plug-in for Manifold, Vacuum, V Port: Metric Size, ø6 One-touch Fitting, Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option, Individual Release Pressure Supply: w/o

System: Vacuum Pump System for Manifold, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: Common Wiring, Plug-in for Manifold, Vacuum, V Port: Inch Size, ø1/4" One-touch Fitting, Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option, Individual Release Pressure Supply: w/

System: Vacuum Pump System for Manifold, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: Common Wiring, Plug-in for Manifold, Vacuum, V Port: Inch Size, ø5/16" One-touch Fitting, Bracket: w/o Option, Pump System PE Port Female Thread: with Pump System PE Port Female Thread, Individual

System: Vacuum Pump System for Manifold, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: Common Wiring, Plug-in for Manifold, Vacuum, V Port: Inch Size, ø5/16" One-touch Fitting, Bracket: w/o Option, Pump System PE Port Female Thread: w/o Option, Individual Release Pressure Supply: w

System: Vacuum Pump System for Manifold, Valves: Supply Valve; N.C., Release Valve; N.C., Rated Voltage: 24 VDC, Vacuum Sensor: w/o Pressure Sensor, Digital Pressure Switch for Vacuum, Connector: Common Wiring, Plug-in for Manifold, Vacuum, V Port: Metric Size, ø6 One-touch Fitting, Bracket: w/o Option, Pump System PE Port Female Thread: with Pump System PE Port Female Thread, Individual

ZP

)-(B5/B6/B8) ZPR-(04/06/08)-(A5/A6/A8) y t t Component Parts No.

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

CATALOG

Wiring Specs 08 08 Applicable up to 8 Solenoids 26 Pole (P) Connector Symbol Station Note 02 2 Single .. ..

1

Symbol Stations Note Symbol Stations Note 02 02 2 stations 2 stations All double wiring All double wiring 04 02 08 02 8 stations 4 stations The asterisk denotes the symbol for assembly. Prefix it to the part numbers of the valve etc. 2 stations 2 stations All single wiring All single wiring 08 12 The valve arrangement is numbered as the 1st station from the D side.

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

AS

Model Meter-out type Rod and applicable tubing O.D. 4 6 ) ) 8 ) 10 ) Meter-in type AS1000P-04-04 AS2000P-04-04 AS2000P-06-06 AS2500P-06-06 AS3000P-08-08 AS3000P-10-10 AS1010P-04-04 AS2010P-04-04 AS2010P-06-06 AS2510P-06-06 AS3010P-08-08 AS3010P-10-10 ) ) The lock nut provides identification.

M-E05-1-LQ1

LQ1-3N08 LQ1-3B08 3-08 LQ1-3N08 LQ1-3B08 LQ1T32-ST2 3 Applicable body size 3 3-08 LQ1-3N08 LQ1-3B08 3-08 LQ1-3N08 LQ1-3B08 LQ1T32-ST3 3 3-08 LQ1-3N08 LQ1-3B08 Applicable body size 3 LQ1T32-ST4 3 Applicable body size 3 3-08 LQ1-3N08 LQ1-3B08 LQ1T41-ST1 4 4-12 LQ1-4N12 LQ1-4B12 Applicable body size 4 4-12 LQ1-4N12 LQ1-4B12 LQ1T41-ST2 4 Applicable body size 4 4-12 LQ1-4N12 LQ1-4B12 4-12 LQ1

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Table of Contents

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

2

Thread type Nil R N NPT G G INDEX 498 Series AS-FS Needle Valve/Flow-rate Characteristics AS1201FS-M5, AS1211FS-M5 AS2201FS-01, AS2211FS-01 AS2201FS-02, AS2211FS-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 06, 07, 08, 09, 10 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (

Table of Contents

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30