Nozzle Diameter: ø1.0mm, Vacuum Pressure: -90 kPa, SUP: One-touch Fitting ø6, VAC: Screw-in G1/8, EXH: One-touch Fitting ø8, Accessories: w/o Bracket, w/o Silencer

Lightweight, point-of-use ZH and ZU series vacuum generators combine design simplicity with high performance. Simply plug an air supply tube in one end, and vacuum is ready at the other end. The slim ZU generators are extra compact. The ZH and ZU immediate response may be quicker than central vacuum systems. Also, these generators are often smaller and lighter than the bulky vacuum lines

Compact and Lightweight

B All Ports: One-touch Fitting Model D1 D2 D3 d1 d2 d3 M1 M2 M3 L1 L21 L3 L4 A B C E F G1 J1 K1 N1 P1 Q1 ZH05DA-06-06-06 10.4 10.4 10.4 6 6 6 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-06-06-06 55 ZH10DA-06-06-08 13.2 8 14.2 61.7 ZH13DA-08-10-10 13.2 15.9 15.9 8 10 10 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-08-10-10 83.6

VM

VM120-01-06S VM130-01-06 VM130-01-06S VM122-M5-06 VM122-M5-06S VM132-M5-06 VM132-M5-06S Roller plunger Polyacetal roller Hard steel roller VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132

VM

VM120-01-06S VM130-01-06 VM130-01-06S VM122-M5-06 VM122-M5-06S VM132-M5-06 VM132-M5-06S Roller plunger Polyacetal roller Hard steel roller VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132

Micro Mechanical Valve Series VM1000

VM1100-4NU-08 VM1000-4NU-08 Applicable tube P.T.

Table of Contents

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

VM

VM120-01-06S VM130-01-06 VM130-01-06S VM122-M5-06 VM122-M5-06S VM132-M5-06 VM132-M5-06S Roller plunger Polyacetal roller Hard steel roller VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure

Tamper Proof and Flat Head Screw

Type Metric sizes Inch sizes Elbow Universal 2 3 3.2 01 23 1/8 5/32 3/16 1/4 5/16 3/8 1/2 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control type Meter-out Meter-in 0 1 Use 1/8 tubing.

Table of Contents

03 04 06 q Description No.

VFR

VFN Pilot type Nil R External pilot Internal pilot Plug-in VFR5000 P 06 Non plug-in VFS5000 S 06 Thread type Nil Rc Plug-in VFR5000 P B 06 G F N NPT Non plug-in VFS5000 S B 06 NPTF T Note) Bottom ported is not available for external pilot.

VR4151/4152

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is turned

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure

VZM400

VZM550-01-06S Toggle lever VZM550-01-08 PAT.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Note) Made to Order Refer to page 743 for details. 1/4 standard Metric size Inch size 3/8 standard 3.2 01 03 05 07 09 11 13 23 04 06 08 10 12 1/8" 1/2 standard 5/32" 4 Caution 3/16" 6 With One-touch fittings 1/4" 8 Be sure to read this before handling the products.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

1

Applicable fitting size d (Inch size) Model Applicable fitting size d (Metric size) A L D A L D Model KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 KQ2P-13 KJP-02 KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 d 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" 16 16 18 20.5 22 24 31.5 32 35 39 43 46 5 6 8.5 10 11.5 15 2 3.2 4 6 8 10 12 8.2 16 16 18 20.5 22 24 17 31.5 32 35 39 43 45.5 3 5 6 8 10 12 14 D A L Note

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

EB:3/8 NPTF) O.08(:::2.!

Vacuum

s6 Tube a o a o 08 08 Tube a a E E 5 List O Pad Dia.