smcmaintenancepartslist

Contents 16 MGP16-AZ-PS Set of left nos. @6, @7, @8, @9, #0 50 MGP50-AZ-PS Set of left nos. @6, @7, @8, @9, #0 20 MGP20-AZ-PS 25 MGP25-AZ-PS 32 MGP32-AZ-PS 40 MGP40-AZ-PS 63 MGP63-AZ-PS 80 MGP80-AZ-PS 100 MGP100-AZ-PS * Seal kit includes @6 to #0. Order the seal kit, based on each bore size. * Since the seal kit does not include a grease pack, order it separately.

Air Cylinder

[mm] Auto Switch Mounting Height Auto switch model Band mounting D-H7l/H7lW D-H7NF D-H7BA D-C7l/C80 D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9l D-M9lW D-M9lA D-A9l D-H7C D-C73C D-C80C Hs Hs Hs Hs Hs 6 15 16 15 18 17.5 10 17 18 17 20 19.5 16 20.5 21 20.5 23.5 23 Bore size [mm] Auto switch model Rail mounting D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A9l D-A9lV D-F7l/J79 D-F7lW/J79W D-F7BA/F79F

Body Size: 24 (AC20), Thread Type: N (NPT), Port Size: 02 (1/4), Pressure Gauge: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Mounting Direction: Front to Back Mounting, Unit: Z (Pressure Gauge: MPa/psi Dual Scale)

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

2

D H Note) D is maximum diameter.

Made to Order

D-M9(V)/M9W(V)/M9A(V) D-A9(V) D-B5/B6 D-G5/K5 Hs Hs B A B A D-B7/B8 D-G7/K7 D-C7/C8 D-H7 Hs Hs B A B A Proper Auto Switch Mounting Position (mm) Proper Auto Switch Mounting Height (mm) D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C D-H7C D-G5NT D-G5/K59 D-G5W D-K59W D-B5/B64 D-B59W D-G5BA D-G59F Auto switch model D-G59F/G5 D-K59 D-G5W D-K59W D-G5NT D-G5BA Auto switch model D-H7 D-H7C D-H7NF D-H7W

MY1

Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y59A, D-Y69A D-Y59A D-Y69A D-Y7P D-Y7PV D-Y59B D-Y69B Auto switch model no.

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K J F H K J (D) F H 2 x P Port size 2 x P Port size Conduit terminal: T DIN terminal: D M N E (N) (M) E C C 25 32 31.5 (44) A A G1/2 L L G1/2 OUT IN OUT IN Applications B B (D) F H (D) F H K J K J 2 x P Port size Cable 6 to 12 2 x P Port size With bracket e a g d Bracket h b i (mm) Model A B C D E F H J K Port size P N.C. 1/4, 3/8 1/2 3/4 1/1 40 52 65 70 22 29.5 36 40.5 20 26 32.5 35 30

3-Position Rotary Table

(Make sure that there is no rotation backlash in the table.) 3 Tighten both adjustment bolts c and d to approx. 45. Note 1) Tighten both adjustment bolts c and d to approx. 45. Note 1) 4 Lock adjustment bolts c and d with fixing nuts. Note 2) Lock adjustment bolts c and d with fixing nuts.

Series VCL

Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit

Series VCS

Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

D-F8 has no protrusion from the body's end surface.

VDW Series

Enter together in order, counting from station 1 on the D side.

Process Gas Diaphragm Valve

AZ Note) MV6 is bar stock body.

AZ1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Series AP500

Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass 1) 14 to 194F (10 to 90 C) for Vespel seat. 2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 2 Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Series SV

D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

1

/C8 D-H7 A B 11.5 8.5 16 Auto switch D-C7/C8, D-H7 D-B5/B6 D-G5/K5 A 12 14.5 B 24.5 Auto switch D-B5/B6, D-G5/K5 D-B7/B8 D-G7/K7 8.5 A 14.5 B 11 Auto switch D-B7/B8, D-G7/K7 Auto Switch Mounting Position D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C Auto switch model D-C7/C8 D-C73C D-C80C D-G5 D-K5 D-G5NYL D-B59W D-H7 D-H7C D-H7W D-H79F D-H7BAL Bore size (mm