Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Body Size: 24 (AC20), Thread Type: N (NPT), Port Size: 02 (1/4), Pressure Gauge: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Mounting Direction: Front to Back Mounting, Unit: Z (Pressure Gauge: MPa/psi Dual Scale)

2

D H Note) D is maximum diameter.

Made to Order

D-M9(V)/M9W(V)/M9A(V) D-A9(V) D-B5/B6 D-G5/K5 Hs Hs B A B A D-B7/B8 D-G7/K7 D-C7/C8 D-H7 Hs Hs B A B A Proper Auto Switch Mounting Position (mm) Proper Auto Switch Mounting Height (mm) D-B7/B80 D-B73C D-B80C D-G79/K79 D-K79C D-H7C D-G5NT D-G5/K59 D-G5W D-K59W D-B5/B64 D-B59W D-G5BA D-G59F Auto switch model D-G59F/G5 D-K59 D-G5W D-K59W D-G5NT D-G5BA Auto switch model D-H7 D-H7C D-H7NF D-H7W

MY1

Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y59A, D-Y69A D-Y59A D-Y69A D-Y7P D-Y7PV D-Y59B D-Y69B Auto switch model no.

3-Position Rotary Table

(Make sure that there is no rotation backlash in the table.) 3 Tighten both adjustment bolts c and d to approx. 45. Note 1) Tighten both adjustment bolts c and d to approx. 45. Note 1) 4 Lock adjustment bolts c and d with fixing nuts. Note 2) Lock adjustment bolts c and d with fixing nuts.

Series VCL

Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit

Series VCS

Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

D-F8 has no protrusion from the body's end surface.

VDW Series

Enter together in order, counting from station 1 on the D side.

This is a legacy product, and replaced byAR40-N02E-Z-D AR MASS PRO. REGULATOR. AIRLINE EQUIPMENT. AR MASS PRO 1/4 MODULAR (PT). 1.21516 lb. DC.

This is a legacy product, and replaced byAR20-N02E-RZ-D AR MASS PRO. REGULATOR, MODULAR. AIRLINE EQUIPMENT. AR MASS PRO 1/4 MODULAR (PT). .44092 lb. DC.

This is a legacy product, and replaced byAR20-N02E-RZ-D AR MASS PRO. REGULATOR, MODULAR, 1/4 NPT. AIRLINE EQUIPMENT. AR MASS PRO 1/4 MODULAR (PT). 0.57267 lb. DC.

This is a legacy product, and replaced byAC40-N02E-Z-D AC MASS PRO. F/R/L COMBO MODULAR. AIRLINE EQUIPMENT. AC MASS PRO 1/4 MODULAR (NPT). 4.6297 lb. DC.

This is a legacy product, and replaced byAW20-N02E-6CZ-D AW MASS PRO. FILTER REGULATOR, MODULAR. AIRLINE EQUIPMENT. AW MASS PRO 1/4 MODULAR (NPT). 0.814 lb. DC.

Process Gas Diaphragm Valve

AZ Note) MV6 is bar stock body.

AZ1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Series AP500

Outboard leakage Leak rate Across the seat leak Surface finish Connections Supply pressure effect Installation Internal volume Mass 1) 14 to 194F (10 to 90 C) for Vespel seat. 2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 2 Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ

SL5200

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

Series AP3500

(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish