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New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

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This is for reference. *8 Indicates case of grommet type Flow Rate Characteristics Face seal fitting/Compression fitting XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA2-43 XSA3-32 XSA3-43 Flow rate characteristics C[dm3/(sbar)] 0.55 1.07 1.07 1.51 2.78 1.54 2.89 b 0.41 0.36 0.34 0.24 0.21 0.24 0.21 (Rc, NPT) Female thread XSA1-11 XSA1-21 XSA2-22 XSA2-32 XSA3-33 XSA3-43 Flow rate characteristics C[dm3

XL

Mode: VX021-002DBT-05 (Example) Series XSA3 with 24VDC terminal, surge voltage suppressor and light.

High Vacuum Angle Valve, XL Series

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: N (NPT Female Thread), Voltage: 3 (110 VAC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)

Model: 3 (Size 3), Orifice Size: 4 (ø6), Fitting Size: 3 (3/8), Fitting Type: S (Compression Fitting), Voltage: 3 (110 VAC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)

Model: Size 3, Orifice Size: ø6, Fitting Size: 3/8, Fitting Type: NPT Female Thread, Voltage: 110 VAC, Electrical Entry: DIN Terminal w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 3, Orifice Size: ø6, Fitting Size: 3/8, Fitting Type: Compression Fitting, Voltage: 110 VAC, Electrical Entry: DIN Terminal w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 3 (3/8), Fitting Type: N (NPT Female Thread), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)

Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 3 (3/8), Fitting Type: N (NPT Female Thread), Voltage: 5 (24 VDC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor)

Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 3 (3/8), Fitting Type: N (NPT Female Thread), Voltage: 5 (24 VDC), Electrical Entry: DL (DIN Termianl w/Light, w/Surge Voltage Suppressor)

Model: Size 3, Orifice Size: ø4.5, Fitting Size: 3/8, Fitting Type: NPT Female Thread, Voltage: 24 VDC, Electrical Entry: DIN Terminal w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 3, Orifice Size: ø4.5, Fitting Size: 3/8, Fitting Type: NPT Female Thread, Voltage: 24 VDC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 3, Orifice Size: ø4.5, Fitting Size: 3/8, Fitting Type: NPT Female Thread, Voltage: 24 VDC, Electrical Entry: DIN Termianl w/Light, w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Wedge Cam Operation Provides

For setting the holding force to be at least 20 times the work weight: 20 times the work weight: Required holding force = 0.17kg x 20 x 9.8m/s Required holding force = 0.17kg x 20 x 9.8m/s2 33N 33N Holding point 40mm Holding point 40mm MHZ2 Operating pressure: 0.5MPa Operating pressure: 0.5MPa MHZJ2 Holding Point MHQ External hold Internal hold MHL2 Series MHK Series MHKL Series MHK Series

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Electrical entry Dimensions Formula L1 = 33n + 63 L2 = 33n + 75 n: Stations (Max. 17stations) n 2 129 141 3 162 174 4 195 207 5 228 240 6 261 273 7 294 306 8 327 339 9 360 372 10 393 405 11 426 438 12 459 471 13 492 504 14 525 537 15 558 570 16 591 603 17 624 636 L L1 L2 Note) Actual number of manifold base stations: Add 1 SI unit mounting station to the number of valve stations. 1179 Series

* 1 XSA Series Normal Close High Vacuum Solenoid Valve

XSA1 XSA1R-8-1 XSA2 XSA2R-8-1 XSA3 *1 Not CE-compliant For the special option below, refer to page 7. Special electrical entry direction 2

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Pressure gauge or pressure convertor Thermometer Differential pressure gauge or differential pressure converter d1 Pressure control equipment d3 3d1 3d3 Flow control valve d2 Flow meter Air supply Filter Shut off valve 10d2 3d1 3d2 10d3 10d1 Pipe for measuring temperature Equipment for test Pipe for measuring pressure in the upstream side Pipe for measuring pressure in the downstream side