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40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal
AD17-A AD27-A AD37-A AD47-A Spacer Y100-A Y200-A Y300-A Y400-A Y500-A Y600-A Spacer with bracket Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Check valve Note 5) Note 6) AKM2000-01-A (02)-A AKM3000-(01)-A 02-A AKM4000-(02)-A 03-A Pressure switch Note 6) IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A IS10M-60-A T-spacer Note 5) Note 6) Y110-M5-A Y210-01-A (02)-A Y310-(01)-A 02-A Y410-(02
1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
In the case of 0.8MPa, when port A is a vacuum, port P can be pressurized to 0.8MPa (7kgf/cmG).
Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: F (Faston Terminal)
Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: DL (DIN Termianl w/Light, w/Surge Voltage Suppressor)
Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)
Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)
Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: DO (DIN Terminal w/o Connector, w/Surge Voltage Suppressor)
Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 6 (12 VDC), Electrical Entry: DL (DIN Termianl w/Light, w/Surge Voltage Suppressor)
Model: 3 (Size 3), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 3 (110 VAC), Electrical Entry: DL (DIN Termianl w/Light, w/Surge Voltage Suppressor)
Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -
Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -
Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -
Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -
Model: Size 3, Orifice Size: ø4.5, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: DIN Terminal w/o Connector, w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -
Model: Size 3, Orifice Size: ø4.5, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 12 VDC, Electrical Entry: DIN Termianl w/Light, w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -
Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical