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1

This is for reference. *8 Indicates case of grommet type Flow Rate Characteristics Face seal fitting/Compression fitting XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA2-43 XSA3-32 XSA3-43 Flow rate characteristics C[dm3/(sbar)] 0.55 1.07 1.07 1.51 2.78 1.54 2.89 b 0.41 0.36 0.34 0.24 0.21 0.24 0.21 (Rc, NPT) Female thread XSA1-11 XSA1-21 XSA2-22 XSA2-32 XSA3-33 XSA3-43 Flow rate characteristics C[dm3

Model: 2 (Size 2), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor)

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Face Seal Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

XL

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

High Vacuum Angle Valve, XL Series

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 1 (1/8), Fitting Type: P (Rc Female Thread), Voltage: 5 (24 VDC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 1 (1/8), Fitting Type: N (NPT Female Thread), Voltage: 5 (24 VDC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor)

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 24 VDC, Electrical Entry: Grommet w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø3, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 24 VDC, Electrical Entry: Grommet w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/8, Fitting Type: Rc Female Thread, Voltage: 24 VDC, Electrical Entry: Grommet w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/8, Fitting Type: NPT Female Thread, Voltage: 24 VDC, Electrical Entry: Grommet w/Surge Voltage Suppressor, Special Electrical Entry: -, Spacer: -

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 6 (12 VDC), Electrical Entry: F (Faston Terminal)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: A (90°)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: C (270°)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)