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Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: A (90°)

Model: Size 1, Orifice Size: ø3, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: 90°, Spacer: -

1

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

2

AD17-A AD27-A AD37-A AD47-A Spacer Y100-A Y200-A Y300-A Y400-A Y500-A Y600-A Spacer with bracket Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Check valve Note 5) Note 6) AKM2000-01-A (02)-A AKM3000-(01)-A 02-A AKM4000-(02)-A 03-A Pressure switch Note 6) IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A IS10M-60-A T-spacer Note 5) Note 6) Y110-M5-A Y210-01-A (02)-A Y310-(01)-A 02-A Y410-(02

High Vacuum Angle Valve, XL Series

In the case of 0.8MPa, when port A is a vacuum, port P can be pressurized to 0.8MPa (7kgf/cmG).

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: Size 1, Orifice Size: ø3, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: None, Spacer: w/Spacer

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: A (90°)

Model: Size 1, Orifice Size: ø3, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: 90°, Spacer: -

EXxx-OMN0029CN

DC24 V 108 A () DC24 V +10/-5 Class22 A DC24 V +10/-58 A 1 IP67() -1050 -2060 3585%RH() AC500 V1 FE DC500 V10 M FE 3(UL508) CE UL(CSA)RoHS 170 g 175 g 1 EX600-ED2-31No.EX-OMN0029CN-D EX600-ED3-32No.EX-OMN0029CN-D (DC24 V10%) -33No.EX-OMN0029CN-D LED 0 1 LED Yes No SI 2 3 4 SI ST(M) 5 6 7 SI . -34No.EX-OMN0029CN-D SI 8 ST(M) ST(M) 9 / PWR PWR(V) 10 MSNS 11

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: TL (Terminal w/Light, w/Surge Voltage Suppressor)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor), Special Electrical Entry: B (180°)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 3 (110 VAC), Electrical Entry: T (Terminal w/Surge Voltage Suppressor)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: DL (DIN Termianl w/Light, w/Surge Voltage Suppressor)