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2

Gasket for 10-32UNF: M-5G2 KDM A 05 00 KQ2 H Tube Tube Type Port size/Applicable tubing O.D.

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Compression Fitting, Nominal Designation of Piping Thread: 1/4, Voltage: 24 VDC, Seal Type: Bellows Seal, Electrical

1

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

XL

1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

High Vacuum Angle Valve, XL Series

In the case of 0.8MPa, when port A is a vacuum, port P can be pressurized to 0.8MPa (7kgf/cmG).

One-touch Fittings

Gasket for M5 thread: M-5G2 50 A Inch Size One-touch Fittings Oval Type Variations Bulkhead union Extended male elbow Basically, it is used together with a male elbow. Its extended height allows for multileveled piping and prevents interference among fittings. P.53 KQ2W P.54 KQ2E Use to connect tubing through a panel, etc.

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: B (24 VAC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor), Special Electrical Entry: A (90°), Spacer: A (w/Spacer)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 6 (12 VDC), Electrical Entry: C (Conduit w/Surge Voltage Suppressor), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: 1 (Size 1), Orifice Size: 1 (ø2), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 6 (12 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 24 VAC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: 90°, Spacer: w/Spacer

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 12 VDC, Electrical Entry: Conduit w/Surge Voltage Suppressor, Special Electrical Entry: None, Spacer: w/Spacer

Model: Size 1, Orifice Size: ø2, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 12 VDC, Electrical Entry: Grommet, Special Electrical Entry: None, Spacer: w/Spacer

Table of Contents

panel of a device.

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: S (Compression Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: 1 (Size 1), Orifice Size: 2 (ø3), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: G (Grommet), Special Electrical Entry: None, Spacer: A (w/Spacer)

Model: Size 1, Orifice Size: ø3, Fitting Size: 1/4, Fitting Type: Compression Fitting, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: None, Spacer: w/Spacer

Model: Size 1, Orifice Size: ø3, Fitting Size: 1/4, Fitting Type: Face Seal Fitting, Voltage: 24 VDC, Electrical Entry: Grommet, Special Electrical Entry: None, Spacer: w/Spacer