Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

XL

J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

Table of Contents

2!

MHS

MH*-OMM0056 MHS2-D MHS3-D MHS4-D MHSJ3-D MHSH(J)3-D 1. 23 2. 2-1. 45 3. 3-1. 6 3-2. 67 3-3. 713 3-4. 13 3-5. 14 3-6. 14 3-7. 14 4. 4-1. 14 4-2. 1518 4-3. 1922 4-4. 2326 1 [ ][][] ISO4414*1)JISB8370*2) 1) ISO4414Pneumatic fluid power-Recommendations for the application of equipment to transmission and control systems. 2) JIS B8370 2 1. 2. 3. 4. 3 2 2-1 MHS2 MHS2 -16D MHS2 -20D MHS2 -25D

Compressed Air Preparation Filter

Symbol Type Nil Rc F G N NPT Micro mist separator Mist separator Symbol Port size Applicable body size 70D 80D 90D 10 1 V 14 1 1/2 V V V 20 2 V Accessory Part Nos. 1 2 Description Model 70D 80D 90D Bracket AM-BM70D AM-BM90D L * Includes mounting bolts (2 pcs.) Construction: AFF, AM, AMD t q IN OUT w Component Parts No.

Air preparation filter

391.5 379.5 382 31.5 144 136 68 23 40 AFF,AM,AMD 80D 1 1/2 404 392 394.5 38 170 160 80 23 40 AFF,AM,AMD 90D 1 1/2 2 470 458 460.5 38 170 160 80 23 40 Model Bracket related dimensions H I J K L M N O P AFF,AM,AMD 70D 124 82 48.4 90 18 9 16 10 2.6 AFF,AM,AMD 80D 148 93.5 58.5 110 22 11 20 12 3.2 AFF,AM,AMD 90D 148 93.5 58.5 110 22 11 20 12 3.2 -22- Doc. no.

CATALOG

3 0 1.3 1.06 2.19 3/8-18 1 3/8 2.13 3 3/4 2.48 5 1/4 1 1 1/4 2 3/8 2 5/16 3/4-16 7/8 3/8 3/8 19/32 325 (3.25) 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 2.76 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 1 3/8 1 1/2 2 5/8 2 11/16 1-14 1/2 5/8 5/8 400 (4) 1 3/8 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 3.32 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 2 1/10 2 5/8 2 11/16 1-14 1/2 5/8 5/

A

3 0 1.3 1.06 2.19 3/8-18 1 3/8 2.13 3 3/4 2.48 5 1/4 1 1 1/4 2 3/8 2 5/16 3/4-16 7/8 3/8 3/8 19/32 325 (3.25) 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 2.76 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 1 3/8 1 1/2 2 5/8 2 11/16 1-14 1/2 5/8 5/8 400 (4) 1 3/8 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 3.32 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 2 1/10 2 5/8 2 11/16 1-14 1/2 5/8 5/

Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

2

(See Fig. 2.)

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SEAL, XLG-40-X1260, VACUUM SERIES, XLG NO SIZE RATING, .01034 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, O-RING, XLG-40-X1260, VACUUM SERIES, XLG NO SIZE RATING, .01034 lb

CA2

2) n = 2, 4, 6, 8 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 55 + 50(n 2) n = 2, 3, 4 75 + 50(n 2) n = 2, 4, 6, 8 80 + 50(n 2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4, 6, 8 Different sides D-A44C With n Same side 10 75 80 90 1 2 (Different sides and same side) With 1 85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W 15 + 40 (n 2) 2 n = 2, 4, 6, 8 80 + 40 (n 4) 2 n = 4, 8, 12, 16

CNA

2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different sides D-A44C n Same side 10 75 80 90 1 2 (Different sides, Same side), 1 15 80 85 90 95 105 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2

CNA

(n 2) n = 2, 3, 4, 5 Same side 100 + 100 (n 2), n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different

JXCx-OMT0005CN

1 *1 *2 1mm/s 2 15 Byte16,17 Byte 16 *1 *2 1% 17 *1 *2 21(P.85 40 - Byte18,19 Byte 18 *1 *2 1% 19 Byte20,21 Byte 20 *1 *2 1mm/s 21 Byte22,23 Byte 22 *1 *2 1% 23 Byte24-271 Byte 24 1 -+ *2 0.01mm 25 26 27 Byte28-312 Byte 28 2 -+ *2 0.01mm 29 30 31 Byte32-35 Byte 32 *1 *2 0.01mm 33 34 36 *1 *2 21(P.85 41 - 11 () 2 () () 3 11.1 12 64 )()[] 1 2 No. 2 mm/s mm 2 % mm mm mm/s

CL

1/2 8 11 11 13 16 With rod boot CLAL40SCLA40, #2 (#1+#2+#11) CLAL50SCLA50, #2 (#1+#2+#11) CLAL63SCLA63, #2 (#1+#2+#11) CLAL80SCLA80, #2 (#1+#2+#11) CLAL100SCLA100, #2 (#1+#2+#11) Without rod boot Bore (mm) l 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke Y h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14.0 e 43 52 52 65 65 ZZ 244 266 290 339 358 H 51 58 58 71 72 ZZ 252 274 298 348 367 40

Flange Size: 80, Flange Type: D [K(DN)], Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy), Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)