High Vacuum Angle Valve, XL Series -16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 H0 Without heater H1 With heater for 80 (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Note) Auto switches cannot be mounted in the case of high temperature types.
Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage
Valve specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Double acting (Dual operation), Pressurize to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal
It was confirmed that XLG-80 satisfied it up to 2 million cycles, XLG-100 and XLG-160 satisfied it up to 1 million cycles. The test was performed with FKM, the standard sealant material.
Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)
Flange Size: 25, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)
Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Flange Size: 25, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
(C) Correction factor 1.21 1.10 1 0.87 0.76 0.74 0.72 0.70 IDG 5 to 30 35 40 45 50 55 60 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 45 50 55 60 65 70 75 80 5 to 45 50 55 60 65 70 75 80 Data B: Ambient Temperature Note) Series IDF IDF1E to 75E Series IDU IDU3E to IDU37E IDU55E, 75E IDF100F to 150F IDF190D to 240D Ambient temp.
Flange Size: 80, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)
Flange Size: 80, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: Required for XLC-50 through 80 Bore, and XLG-50 through 160 Bore
Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 1m, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: Required for XLC-50 through 80 Bore, and XLG-50 through 160 Bore
Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 1m, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: Required for XLC-50 through 80 Bore, and XLG-50 through 160 Bore
Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 1.41611 lb
Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 3.04972 lb
Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 2.93474 lb
Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 3.63762 lb
Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 1.65346 lb
Valve Type: Double Acting, O-ring Seal, Flange Size: 80, Flange Type: -, Port Direction: -, Temperature: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: -