High Vacuum Angle Valve, XL Series

J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

High Vacuum L Type Valve

Heater specifications Itemsymbol XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

2

Specifications Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 37.5 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 Model Port size Specifications IN, OUT EXH IN OUT OUT EXH C(dm3/sbar) b Cv C(dm3/sbar) b Cv VHS20 1/8 1/8 2.4

Valve Type: Double Acting, O-ring Seal, Flange Size: 63, Flange Type: -, Port Direction: -, Temperature: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: -

XLGR Series

It was confirmed that XLG-80 satisfied it up to 2 million cycles, XLG-100 and XLG-160 satisfied it up to 1 million cycles. The test was performed with FKM, the standard sealant material.

Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 1.41611 lb

Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 3.04972 lb

Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 2.93474 lb

Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 3.63762 lb

Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 1.65346 lb

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Flange Size: 63, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: B (1pc, Valve Open)

Valve Type: Double Acting, O-ring Seal, Flange Size: 63, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen.

Flange Size: 63, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 1pc, Valve Open, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 2.97624 lb

HIGH VACUUM VALVE, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 18.21018 lb

Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 0.99208 lb

Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 1.50079 lb

Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING