XL

J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.

Table of Contents

Note 9) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch. 14-2-73 74 Filter Regulator with Back Flow Mechanism Series AW20K/30K/40K How to Order AW 30 03 BE K F 1N Option Filter regulator Applicable model AW20K to 40K AW20K to 40K AW20K to 40K AW30K/40K AW20K AW30K/40K AW20K to 40K AW20K to 40K AW30K/40K AW20K to 40K Symbol 1 2 6 8

AWG

Thread type Symbol Nil N F Type Rc NPT G (2) (3) Accessory (2) (4) Symbol Nil H Description With set nut Applicable model AWG20K to 40K Note 2) Drain guide is Rc1/8 for AWG20K and Rc1/4 for AWG30K and 40K. Note 3) Drain guide is NPT1/8 for AWG20K and NPT1/4 for AWG30K and 40K. Auto-drain port is provided with 3.8" One-touch fitting (applicable to AWG30K and 40K).

XLG Series

It was confirmed that XLG-16, XLG-25, XLG-40 satisfied the valve specification up to 3 million cycles,XLG-50, XLG-63, XLG-80 satisfied it up to 2 million cycles, XLG-100 and XLG-160 satisfied it up to 1 million cycles. The test was performed with FKM, the standard sealant material.

Modular F.R.L. Unit

cock with barb fitting (6 x 4 nylon tube) Applicable models AW20K to 40K AW20K to 40K AW20K to 40K AW30K, 40K AW20K AW30K, 40K AW20K to 40K AW20K to 40K AW30K, 40K AW20K to 40K Symbol 1 Note 1) 2 6 8 C J Note 2) N R W Z Note 3) Body size 20 30 40 1/8 3/8 1/2 With backflow mechanism Note) AW10 comes with a backflow mechanism as a standard feature.

High Vacuum Angle Valve

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

Modular F.R.L. Unit

Note 2) AW30K, 40K 01 1/8 AW20K E With square embedded type pressure gauge (with limit indicator) AW20K to 40K 02 1/4 G With round pressure gauge (with limit indicator) AW20K to 40K 03 3/8 H With set nut (for panel mount) AW20K to 40K 04 1/2 Note 1) Optional parts are not assembled and are supplied loose at the time of shipment (except for options C, D and E). 06 3/4 Note 2) Applicable tube

Best Pneumatics Vol. 14

Note 9) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch. 14-2-73 74 Filter Regulator with Back Flow Mechanism Series AW20K/30K/40K How to Order AW 30 03 BE K F 1N Option Filter regulator Applicable model AW20K to 40K AW20K to 40K AW20K to 40K AW30K/40K AW20K AW30K/40K AW20K to 40K AW20K to 40K AW30K/40K AW20K to 40K Symbol 1 2 6 8

Modular Type Filter Regulator Series AW

Note 2) Symbol Nil B C D E G H Applicable model AW20K to 40K AW20K to 40K AW30K, 40K AW20K to 40K AW20K to 40K AW20K to 40K Port size Body size Symbol Port size 20 30 40 Float type auto drain (N.O.)

smcmaintenancepartslist

Recommended length Part No. st + 118 0 2 st + 145 0 2 st + 174 0 2 st + 221 0 2 st + 272 0 2 st + 305 0 2 st + 352 0 2 st + 106 0 2 st + 125 0 2 st + 146 0 2 st + 189 0 2 st + 236 0 2 st + 270 0 2 st + 316 0 2 MY3A16-16B-st MY3A20-16B-st MY3A25-16B-st MY3A32-16B-st MY3A40-16B-st MY3A50-16B-st MY3A63-16B-st MY3B16-16B-st MY3B20-16B-st MY3B25-16B-st MY3B32-16B-st MY3B40-16B-st MY3B50-16B-st

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Note 2) Check valve assembly contains check valve, check valve cover and its screws (2 pcs). 27 Series ARG20K/30K/40K Construction F E Port size D A C IN OUT SMC G R B Q Set nut (Option) S P T N M Bracket (Option) Panel fitting dimension K J IN OUT L H P K U C S O H L to Plate thickness ARG20K to 40K: Max. 3.5 Standard specifications Accessory specifications Panel mount Bracket mount A Model

modular-press-e

AD48-6 AD38-6 Nylon AD27-6C AD27-6C C3SF-6J C4SF-6J C2SF-6J C3SF-6J C2SF-6J w C3SF-6W C4SF-6W C3SF-6W C2SF-6CJ C2SF-6CJ r C3SF-2 C4SF-2 C2SF-2 C3SF-2 C1SF-2 C2SF-2 AD37-2 AD47-2 AD27-2 AD37-2 AD17-2 AD27-2 e Metal AD38-2 AD48-2 AD38-2 C3SF-2J C4SF-2J t C3SF-2J C2SF-2J C2SF-2J C3LF-8 C4LF-8 C3LF-8 AD37-8 AD47-8 AD37-8 Metal bowl with level gauge AD38-8 AD48-8 AD38-8 C3LF-8J C4LF-8J C3LF

Modular F.R.L. Pressure Control Equipment

AD48-6 AD38-6 Nylon AD27-6C AD27-6C C3SF-6J C4SF-6J C2SF-6J C3SF-6J C2SF-6J w C3SF-6W C4SF-6W C3SF-6W C2SF-6CJ C2SF-6CJ r C3SF-2 C4SF-2 C2SF-2 C3SF-2 C1SF-2 C2SF-2 AD37-2 AD47-2 AD27-2 AD37-2 AD17-2 AD27-2 e Metal AD38-2 AD48-2 AD38-2 C3SF-2J C4SF-2J t C3SF-2J C2SF-2J C2SF-2J C3LF-8 C4LF-8 C3LF-8 AD37-8 AD47-8 AD37-8 Metal bowl with level gauge AD38-8 AD48-8 AD38-8 C3LF-8J C4LF-8J C3LF

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VER 3 L L 2 2 VEA 10 AFM AF ARP20K/30K/40K VHS VY1 1 1 12 2 4 14 Solenoid valve: Non-lube type VBA VBAT 5 1 3 AP100 2 1 2 1 2 1 L L AFM AF ARP 701 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Symbol Regulator with backflow function Regulator

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VY1 3 L L VBA VBAT 2 2 10 AFM AF ARP20K/30K/40K VHS AP100 1 1 12 2 4 14 Solenoid valve: Non-lube type 5 1 3 2 1 2 1 2 1 L L AFM AF ARP 759 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 Series RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Series Symbol Regulator with backflow function

REGULATOR

2) AR20K-B/25K-B/30K-B/40K-B/50K-B/60K-B Bracket assembly Panel mounting disassembly drawing Bracket assembly Mounting screws (2 pcs) Bracket Products Bracket assembly AR20K-B / 25K-B / 30K-B / 40K-B Bracket assembly Bracket assembly B / 60K-B AR50K-B / 60K (Roulette faces) (Roulette faces) Bracket assembly (Concave) Set nut (Convex) Products Bracket 14 9.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Note 3) Includes one O-ring and 2 mounting screws. [ ]: Pressure gauge cover only. Note 4) Lead wire with connector (2 m), adapter, lock pin, O-ring (1 pc.), and mounting screws (2 pcs.) are included. [ ]: Switch body only.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Note 3) Includes one O-ring and 2 mounting screws. [ ]: Pressure gauge cover only. Note 4) Lead wire with connector (2 m), adapter, lock pin, O-ring (1 pc.), and mounting screws (2 pcs.) are included. [ ]: Switch body only.

rep-modular-e

assembly (Setting mark) Plug assembly Plug AW30K/40K O-ring Square embedded pressure gauge body Check valve plug assembly Mounting screws (2 pcs) (Arrow) Pressure gauge adaptor assembly @ Pressure gauge cover O-ring Square type pressure gauge Pressure gauge adaptor Mounting screws (2 pcs) (Detent: 2 places) (Detent insertion hole: 2 places) (Width across flats) Pressure gauge Note.)