Flange Size: 25, Flange Type: KF(NW), Port Direction: L (Rear Flange Surface), Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)

Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1pc, Valve Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Flange Size: 25, Flange Type: KF(NW), Port Direction: Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Type: Pilot Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 25, Seal Type: Elastic Seal, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9B solid-state auto switch, Number

Type: Pilot Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 25, Seal Type: Elastic Seal, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9B solid-state auto switch, Number

Aluminum Air-Operated Angle Valve, HIGH VACUUM VALVE, L47, 0.57 lb

Aluminum Air-Operated Angle Valve, HIGH VACUUM VALVE, 0.57 lb

Aluminum Air-Operated Angle Valve, HIGH VACUUM VALVE, 0.5 lb

High Vacuum Angle Valve

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

XL

J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.

XLG Series

It was confirmed that XLG-16, XLG-25, XLG-40 satisfied the valve specification up to 3 million cycles,XLG-50, XLG-63, XLG-80 satisfied it up to 2 million cycles, XLG-100 and XLG-160 satisfied it up to 1 million cycles. The test was performed with FKM, the standard sealant material.

High Vacuum Angle Valve

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 25l 2 pcs.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 25l 2 pcs.

Compact Cylinder

Order no. 2.

Compact Cylinder Series CQS

Basic style (Through-hole/Both ends tapped common): CQSK/CDQSK 12 16 Auto switch H thread effective depth C 2 x 2 x OB counterbore Minimum lead wire bending radius 10 2 x M5 x 0.8 2 x 2 x OA effective depth RA Note) 2 x N through Width across flats Flat washer 2 pcs.

CQS

2, !3, !4.

XLGR Series

It was confirmed that XLG-80 satisfied it up to 2 million cycles, XLG-100 and XLG-160 satisfied it up to 1 million cycles. The test was performed with FKM, the standard sealant material.