IDX-OM-M051 and function of parts . 1 4 Chapter 2 Transportation and installation 2 1 Transportation . 2 1 2 2 Installation . 2 2 2 2 1 Environment . 2 2 2 2 2 Fixing of product . 2 3 2 2 3 Pneumatic piping . 2 4 2 2 4 How to connect the facility water piping . 2 4 2 2 5 Draining piping . 2 5 2 2 6 Draining piping for condensed water . 2 6 2 2 7 Electric wiring . 2 7 2 3 Prevention of the facility water
Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage
No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.
J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.
J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.
Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage
2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.
2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.
2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.
2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.
2 2-2-2 P.6-2 6.3 IDF-AB501 14 1 1 1 4 5 3 2 1 600mm 600mm 600mm 600mm 600mm 2-2 IDF100150F 2 3 IDX-OM-U021 2 2-2-3 IDF100F-30 () 2-2 IDF100150F 2 4 IDX-OM-U021 2 2-2-4 60 60 IN OUT 2-2-5 10mm ( 2-2 IDF100150F 2 5 IDX-OM-U021 2 2-2-6 2-2 IDF100150F 2 6 IDX-OM-U021 2 2-2-7 6-1 IEC ) [30mA 30A (IDF100F, IDF125F, IDF150F)] 3.5mm 2 (12AWG) 1418mm4 () 0.6m 30m (
. i-8 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 P . 1-2 1.2.5 R . 1-2 1.2.6 V . 1-2 1.2.7 . 1-2 1.2.7 . 1-2 1.3. . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.2.6 . 2-6 1 IDX-OM-Z004 2.2.7 . 2-7 2.3 . 2-9 2.3.1 . 2-9 2.4 . 2-9 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 3.5 . 3-2 3.6 . 3-3
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, SEAL, XLG-40-X1260, VACUUM SERIES, XLG NO SIZE RATING, .01034 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, O-RING, XLG-40-X1260, VACUUM SERIES, XLG NO SIZE RATING, .01034 lb
Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 1.41611 lb
Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 3.04972 lb
Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 2.93474 lb
Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 3.63762 lb
Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 1.65346 lb