Valve Type: Normally Closed, O-ring Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge Voltage Suppressor

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: L (L Type Plug Connector)

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage

MY1

Hole sizes for centralized piping on the bottom WX 47 56 90 120 Y 15.5 15 45 50 S 14.5 18 d 10 10 18 18 D 17.5 17.5 26 26 R 1.1 1.1 1.8 1.8 Applicable O-ring Model MY1B 50G MY1B 63G MY1B 80G MY1B100G C15 P22 MY1B Bore size G SMY1B Bore size , #2 (#2 + #6) 16 Mechanically Jointed Rodless Cylinder Series MY1B 1 in = 25.4 mm Dimensions (mm) Side Support Side support A MY-S A 2-G 2-H F E C

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

(Single solenoid part no.) 10-SZ3260-5MZ-C63 sets (Double solenoid part no.)

CL

12V 2 wire Connector MY1 5V, 12V 3 wire (NPN) Termina conduit 2 wire 12V Yes 3 wire (NPN) Relay, PLC IC 5V, 12V 24V Diagnostic indication (2 color) 3 wire (PNP) 2 wire 12V Water resistant (2 color) Grommet With timer 3 wire (NPN) IC With diagnostic output (2 color) 5V, 12V 4 wire (NPN) Latching with diagnostic output (2 color) H7LF Lead wire length symbol 0.5m (Example)C80C 5mZ

SZ3000

Pilot type Nil R Internal pilot External pilot How to Order Valve Manifold Assembly Ordering example (SZ3000, Non plug-in) Double solenoid (24 VDC) SZ3260-5MZ-C6 (3 sets) SUP/EXH block (U side mounting) Single solenoid (24 VDC) SZ3160-5MZ-C6 (2 sets) U side D side Stations3 2 1 SS5Z3-60-05U 1 set (Manifold part number) SZ3160-5MZ-C6 2 sets (Single solenoid part no.)

CQ2

With diagnostic output (2 color) F79F 4 wire (NPN) Latch with diagnostic output (2 color) F7LF Lead wire length 0.5m (Example) A80C 5mZ (Example) A80CZ 3m L (Example) A80CL None N (Example) A80CN Solid state switches marked with a are manufactured upon receipt of order.

MU

female thread F79W F7NWV 3 wire (NPN) 5V 12V IC 3 wire (PNP) F7PW Relay, PLC Diagnostic indicator ( 2 color) 24V Yes J79W F7BWV 2 wire 12V Rod end male thread M Water resistant (2 color) F7BA Grommet 3 wire (NPN) With timer F7NT 5V 12V IC With diagnostic output (2 color) Latch with diagnostic output (2 color) F79F 4wire (NPN) F7LF 0.5m (Example) 3mL A80C A80CL A80CZ A80CN 5mZ

MGP

Z80 No IC circuit 3 wire (NPN) Y59A Y69A 5V 12V IC circuit 3 wire (PNP) Y7PV Y7P P.5.3-40 2 wire 12V Y59B Y69B 3 wire (NPN) Solid state switch Relay PLC Grommet Yes 24V Y7NW Y7NWV IC circuit 5V 12V Diagnostic indication (2 color) 3 wire (PNP) P.5.3-48 Y7PW Y7PWV Y7BW Y7BWV 12V 2 wire Water resistant (2 color) Y7BAL P.5.3-63 PLC: Programmable Logic Controller *Lead wire 0.5m (Example) 3mL 5mZ

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Valve Type: Normally Closed, O-ring Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor:

Valve Type: Normally Closed, O-ring Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1 pc, Valve Open, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector, Surge Suppressor: -

Valve Type: Normally Closed, O-ring Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1 pc, Valve Closed, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w/Light & Surge

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed), Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: L (L Type Plug Connector

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: M9P--Solid State, Gen.