Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: Normally Closed, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge

Compact Cylinder

x 45L x 50L x 55L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 120L x 145L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M5 x 35L x 40L x 45L x 50L x 55L

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend CUJ Mounting bolt M3 x 35l x 40l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 60l Mounting bolt M3 x 40l x 45l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 65l C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Model

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Spring Return Spring Extend Mounting bolt M3 x 35l x 40l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 60l Mounting bolt M3 x 40l x 45l M3 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 40l x 45l M5 x 45l x 50l M6 x 55l x 65l C C D 35 40 40 45 40 45 40 45 40 45 45 50 55 60 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 Model CDQP2B12-5S -10S CDQP2B16-5S

NCQ2/CQ2

CQ-M3 x 35L x 40L CQ-M3 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 40L x 45L CQ-M5 x 45L x 50L CQ-M6 x 55L x 60L Cylinder model Mounting bolt part no.

Compact Cylinder Series CQS

Cylinder model Mounting bolt size Mounting bolt size CQSKB12-5D -10D -15D -20D -25D -30D M3 x 25L x 30L x 35L x 40L x 45L x 50L M3 x 25L x 30L x 35L x 40L x 45L x 50L M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 30L x 35L x 40L

CQS

x 45l x 50l M3 x 25l x 30l x 35l x 40l x 45l x 50l M5 x 25l x 30l x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l M5 x 30l x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x 40l x 45l x 50l x 55l M5 x 30l x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l 6.5 6.5 Head

High Vacuum L Type Valve

-16-2 40 108 38 30 17 41 XLFV-25-2 50 121 48 40 26 46 XLFV-40-2 65 171 66 55 41 54.5 XLFV-50-2 70 185 79 75 52 71 XLFV-63-2 88 212 100 87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed), Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector)

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Version: 2 (Refresh), Auto Switch: M9P--Solid State, Gen.

Valve Type: Normally Closed, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: -

Valve Type: Normally Closed, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: Refresh, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: -

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L x 50L x 55L

CQS

3 contained in one kit, and can be ordered using the order number for each respective tube bore size. 2.2-12 Compact Cylinder/Standard: Double Acting Double Rod Series CQSW Mounting Bolt for CQSW Mounting bolt M3 X 30l X 35l X 40l X 45l X 50l X 55l M3 X 30l X 35l X 40l X 45l X 50l X 55l M5 X 35l X 40l X 45l X 50l Mounting bolt M5 X 55l X 60l X 65l X 70l X 75l X 80l M5 X 35l X 40l X 45l X

Digital Flow Switches

11/2 1 2 Switch output Analog output Accumulated pulse output Display unit Sensor unit PF2A710 750 711 721 751 703H 706H 712H PF2A510 550 511 521 551 1 to 10 PF2A30 5 to 50 10 to 100 31 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000 : Output from integrated display type and remote display unit type : Output from remote sensor unit type For Water P.12 16l/min 4l/min 100l/min 40l

Compact Cylinder/Guide Rod Type Series CQM

x 45L x 50L M3 x 25L x 30L x 35L x 40L x 45L x 50L M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 110L x 135L M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 115L x 140L M6 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x