Series SY100 3 Port Solenoid Valve Rubber Seal

Stations 3 2 1 SY114-5GZ Blank plate assembly SY100-77-1A R P Manifold base (5 stations) SS3Y1-S41-05-M5 SS3Y1-S41-05-M5.1set (S41 type 5-station manifold part number) SY100-77-1A .1set (Blank plate assembly part number) SY114-5GZ.4set (Valve) : Assembly symbolprefix "" mark to the installed solenoid valve part number.

Valve Type: Normally Closed, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: H [Grommet ( Lead Wire Length 600mm

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Valve Type: Normally Closed, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: Refresh, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

ZP

Dimensions Dimensions A 6 8 10 13 16 20 25 32 B 7 9 12 15 18 22 27 34 C 1.6 3 3.5 D E F Y Model ZP06B ZP08B ZP10B ZP13B ZP16B ZP20B ZP25B ZP32B Applicable pad ZP2-06K ZP2-08K ZP2-10K ZP2-13K ZP2-16K ZP2-20K ZP2-25K ZP2-32K 3 13.5 0.5 0.5 3.5 5.5 6 16.5 19 20.5 24.5 25 30 4 F 8 8.5 1 1 10 11.5 E Note 1) in the table indicates the attachment material.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Note 2) For 10-V124(A) How to Order Valve Manifold Assembly Ordering example Stations 5 4 3 2 1 Valve (N.C.) 10-V114-5GZ 2 1 3 2 Blanking plate assembly V100-77-1A Manifold base (5 stations) 10-VV100-S41-05-M5 10-VV100-S41-05-M51 set (S41 type 5 station manifold part no.)

Valve Type: Normally Closed, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Left Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: w/Light & Surge Voltage Suppressor

Valve Type: Normally Closed, O-ring Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: F (w/Indicator, Left Flange Surface), Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: Z (w/Light

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Series XLFV is a high vacuum angle valve for use in industrial applications employing high vacuum and process gases.  Common industries that may use this angle valve include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  The XLFV valves are single-acting, normally closed.