Valve Type: Normally Closed, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge

AC Servo Motor Driver (Network card type ）

PT_ _ ]) Initial value Network No./ Setting digit Function symbol/name ECT EIP PNT [unit] PT01 **CTY Command mode selection _ _ _ x For manufacturer setting 0h _ _ x _ 0h _ x _ _ Position data unit 3h 0: mm 1: inch 2: degree 3: pulse This function will be enabled in the profile mode and point table method. The unit is [pulse] in the cyclic synchronous mode.

High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG

Aluminum High Vacuum Angle Valve

XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions

XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 80, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Valve Type: XLFV (Normally Closed, O-ring Seal), Flange Size: 63, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.

Valve Type: Normally Closed, O-ring Seal, Flange Size: 80, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: H [Grommet ( Lead Wire Length 600mm

Valve Type: Normally Closed, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: H [Grommet ( Lead Wire Length 600mm

Valve Type: Normally Closed, O-ring Seal, Flange Size: 63, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Version: Legacy, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: H [Grommet ( Lead Wire Length 600mm

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

JXCx-OMT0023

Position control mode Internal speed control mode PD08 *DI3-2 Input signal device selection 3H (CN1-5) 2C0Dh Refer to Any input signal can be assigned to the CN1-5 pin. The devices that can be assigned and the setting method are the same as in parameter No. PD03. the name and function field. Select the input device of the CN15 pin.

HRX-OM-M090

HRS Series 5.7 Run timer, stop timer function 5-15 HRX-OM-M090 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after 3hours Now 1H 2H 3H 4H 5H 6H 7H 8H Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after 2

HRX-OM-W058

HRS-R Series 5.7 Run timer, stop timer function 5-15 HRX-OM-W058 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after Now 1H 2H 3H 4H 5H 6H 7H 8H 3hours Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after

HRX-OM-X027

HRS-R Series 5.7 Run timer, stop timer function 5-15 HRX-OM-X027 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after Now 1H 2H 3H 4H 5H 6H 7H 8H 3hours Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after

HRX-OM-R016

HRS Series 5.7 Run timer, stop timer function 5-15 HRX-OM-R016 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after 3hours Now 1H 2H 3H 4H 5H 6H 7H 8H Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after 2

HRX-OM-W038

HRS Series 5.7 Run timer, stop timer function 5-15 HRX-OM-W038 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after 3hours Now 1H 2H 3H 4H 5H 6H 7H 8H Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after 2

HRX-OM-O021

HRS Series 5.7 Run timer, stop timer function 5-15 HRX-OM-O021 Chapter 5 Display and setting of various functions Timer setting example Run timer Set to start after 3hours Now 1H 2H 3H 4H 5H 6H 7H 8H Stopped Operating Operating Stop timer Set to stop after 3 hours Now 1H 2H 3H 4H 5H 6H 7H 8H Operating Stopped Stopped Run timer Now 1H 2H 3H 4H 5H 6H 7H 8H Stop timer Set to start after 2