Table of Contents

6 @1 @2 @3 @4 @5 @6 @7 @9 #0 #1 #2 #3 #5 #6 #7 #8 #9 $0 $1 $4 $5 $6 $7 $8 %0 %1 %3 %4 %5 %6 %7 %8 %9 ^1 ^2 ^3 ^4 ^5 ^6 ^8 Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring O-ring O-ring O-ring Connector guide O-ring O-ring Special resin MY40-16A-stroke MY32-16A-stroke MY25-16A-stroke Stainless steel NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR MY40-16B-stroke

Smooth Cylinder/Low Speed Cylinder

Symbol Specifications Change of rod end shape Special port location Made of stainless steel -XA -XC3 Mounting bracket Description (when ordering a minimum number) Bore size (mm) Minimum order 20 25 32 40 -XC6 Axial foot -XC9 2 CM-L020B CM-L032B Foot 2 pcs., Mounting nut 1 pc.

1

Series MY1C XGH7 Long hole depth XG XH Bore size (mm) XH XA XB XD XE XG XJ XB 0.1 XB 0.1 16 20 25 32 40 50 63 40 40 80 40 4 9 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50 40 100 50 4 9 5 51 50 110 55 5 10 6 XGH7 depth XG XA 66 60 140 70 6 11 7 81 80 180

CATALOG

1 325 (3.25) 1 1/8 3.9 1/2 0 1.57 1.18 2.76 1 3/8 2.34 2.72 1 1/2 1 1/2 3/8-24 3 3/4 4 1/4 5 53/64 3/4-16 7/8 1/2 1 400 (4) 4.7 1/2 0 1.57 1.18 3.32 2.34 2.72 1 1/8 1 1/2 1 1/2 3/8-24 4 1/2 1 3/8 4 1/4 5 53/64 3/4-16 7/8 1/2 D I M E N S I O N S F O O T M O U N T I N G T Y P E NC A1L + = Stroke addition E Y LF EE MM AA AB AT BA EA ZA AO J S G WF P SA BORE (INCH) KK A AH AL B C D DD F AE XA

Flange Size: 16, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed), Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: A (External: Hard Anodized - Internal: Oxalic Acid Anodized)

Valve Type: Normally Closed, O-ring Seal, Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, Flange Size Specification: -

Flange Size: 50, Flange Type: KF(NW), Port Direction: G (w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed), Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: A (External: Hard Anodized - Internal: Oxalic Acid Anodized)

Flange Size: 100, Flange Type: D [K(DN)], Port Direction: G (w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed), Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: A (External: Hard Anodized - Internal: Oxalic Acid Anodized)

Flange Size: 50, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: External: Hard Anodized - Internal: Oxalic Acid Anodized, Seal Material: -, Seal Replacement: -

Flange Size: 100, Flange Type: D [K(DN)], Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: External: Hard Anodized - Internal: Oxalic Acid Anodized, Seal Material: -, Seal Replacement

High Vacuum Angle Valve

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 427 B XLF/XLFV Series Specifications Model XLF(V)-16 XLF(V)-25 XLF(V)-40 XLF(V)-50 XLF(V)-63 XLF(V)-80 XLF(V)-100 XLF(V)-160 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLF 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLFV 5 to 50 Operating pressure

Aluminum High Vacuum Angle Valve

U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. 427 XLF/XLFV Series Specifications Model XLF(V)-16 XLF(V)-25 XLF(V)-40 XLF(V)-50 XLF(V)-63 XLF(V)-80 XLF(V)-100 XLF(V)-160 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLF 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLFV 5 to 50 Operating pressure (Pa) (abs) 1 x 10

XL

XLFV 13 Series XLF, XLFV High Vacuum Angle Valve Specifications Model XLF(V)-50 XLF(V)-63 XLF(V)-80 XLF(V)-16 XLF(V)-25 XLF(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLF Operating temperature C 5 to 50C ( 41 to 122F) XLFV Atmospheric

High Vacuum Angle Valve, XL Series

XLFV 13 Series XLF, XLFV High Vacuum Angle Valve Specifications Model XLF(V)-50 XLF(V)-63 XLF(V)-80 XLF(V)-16 XLF(V)-25 XLF(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLF Operating temperature C 5 to 50C ( 41 to 122F) XLFV Atmospheric

High Vacuum Angle Valve

Heater: Indicator: 12 XLF/XLFV Series Dimensions XLF: Air operated (b) C E E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11

XLF Series

It was confirmed that XLF-16, XLF-25 and XLF-40 satisfied the product specification up to 3 million cycles, XLF-50 , XLF-63 and XLF80 did up to2 million cycles. XLF-100 and XLF-160 did up to 1 million cycles. The test was performed with FKM, the standard sealing material.

High Vacuum L Type Valve

-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -