High Vacuum Angle Valve, XL Series

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)-40 Valve type Normally closed (spring return & seal) [both main & initial exhaust valves] Fluid Non-corrosive gas for aluminum

Compact Cylinder

x 85L x 90L x 95L x 130L x 155L CQ-M10 x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 135L x 160L CQ-M10 x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 145L x 170L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 115L x 140L CQ-M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 125L x 150L CQ-M6 x 55L x 60L x 65L x 70L x 75L x 80L x

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

75l x 80l x 85l x 120l x 145l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l x 145l M8 x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 125l x 150l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

75l x 80l x 85l x 120l x 145l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l x 145l M8 x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 125l x 150l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l

NCQ2/CQ2

80L x 85L x 120L x 145L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L 7.5 15 7.5 R V R V 65 70 75 80 85 90 95 x 140L CQ2B50 -10DZ x 70L x 75L x 80L x 85L x 90L x 95L R V x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L 9.5 15.5 12.5 R V -100DZ 165 x 165L x 145L R V CQ2B63 -10DZ x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L 9 14.5 -100DZ

Compact Cylinder Series CQS

M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L M3 x 35L x 40L x 45L x 50L x 55L x 60L M3 x 35L x 40L x 45L x 50L x 55L x 60L M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L RQ 6.5 6.5 Head side mounting style CQM CDQSKB16-5D -10D -15D -20D -25D -30D MU Mounting bolt 6.5 6.5 CDQSKB20-5D -10D -15D

Hydraulic

Example: M8 x 80l 4 pcs.

Compact Hydraulic Cylinder

Mounting bolt Example: M8 x 80L 4 pcs.

Smooth Cylinder/Low Speed Cylinder

x 85L x 90L x 95L x 100L x 135L x 160L CQ-M10 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 140L x 165L CQ-M10 x 75L x 80L x 85L x 90L x 95L x100L x 105L x 110L x 115L x 150L x 175L 40 45 50 55 60 65 70 75 80 85 120 145 45 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 120L x 145L CQ-M5x

CQS

M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M3 x 35l x 40l x 45l x 50l x 55l x 60l M3 x 35l x 40l x 45l x 50l x 55l x 60l M5 x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l M5 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l 6.5 6.5 Head side mounting style Mounting bolt 6.5 6.5 Rod side mounting style 6.5 6.5 Mounting bolt 8.5 8.5 Note) When mounting

Compact Cylinder/Guide Rod Type Series CQM

80 85 90 95 120 145 M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 110L x 135L M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 115L x 140L M6 x 55L x 60L

ZQ-OM01301

switch +50 Manifold part number Model, additional specifications Weight [g] ZZQ101-BSB 115 ZZQ101-BSC 130 ZZQ101-OB 105 ZZQ101-OC 120 1 station +2 Calculation Formula for Weight of the Manifold Type (Weight of the single unit x Number of stations) + (Weight of the manifold part number) + (Weight of 1 station x Number of stations) Model Normally closed Normally open Model Z1-V114-5LU ZQ1-V124-5MU-A

ZQ-OM01401

. +2 +5 +20 Assy +25 +45 +50 [g] ZZQ101-BSB 115 ZZQ101-BSC 130 ZZQ101-BPB 150 ZZQ101-BPC 155 ZZQ101-OB 105 ZZQ101-OC 120 1 +2 (x ) + () + (1 x ) ZQ1-V114-5LU-A ZQ1-V124-5MU-A ZQ1-VQ110L-5L-A / DC24V -10 to 10 (%) 0.4W 1W L M L ( 2 1.7mm 0.2 to 0.33mm ) V100VQ100 33 - No.ZQ-OM01401-B 9.4 ZSE10 [kPa] 0 to -101 -100 to 100 [kPa] 10 to -105 -105 to 105 [kPa] 500 [kPa]

CHKD/CHKG

D C D D CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M6 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 135L x 160L x 185L x 210L CQ-M8 x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 145L x 170L x 195L x 220L x 245L C Model Mounting bolt

CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

Compact Cylinder with Lock Series CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

CLQ

x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l 65 70 75 80 85 90 95 100 105 140 165 75 80 85 90 95 100 105 110 115 150 175 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l x 175l 80 85 90 95 100 105 110 115 120 155 180 90 95 100 105 110 115 120 125 130 165

Hydraulic Cylinders

Example: M8 x 80l 4 pcs.

Hygienic Design Cylinder Series HY

Cylinder model HYQB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 HYQB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 HYQB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 HYQB63-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 HY-M5 x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 145L x 170L HY-M5 x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 125L x 150L x

Compact Hydraulic Cylinder Series CH
KGB

Example: M8 x 80l 4 pcs.