Aluminum High Vacuum Angle Valve VMQ FKM for Plasma ULTIC ARMOR Example) XLD-25-M9NA-XAN1A U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. 448 XLD/XLDV Series Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve How to Order [Option] G XLDV M9N A L 1 25 !
10%) (Power supply ripple: 1% or less) Power supply Foot Flange Bore size (mm) Double clevis 40mA Current consumption 12 20 32 40 50 63 CQ-L012 CQ-F012 CQ-D012 0.1mm/pulse Resolution CQ-L020 CQ-F020 CQ-D020 0.05mm Accuracy CQ-L032 CQ-F032 CQ-D032 Open collector (24V DC, 40mA) Output style CQ-L040 CQ-F040 CQ-D040 A/B phase difference output Output signal CQ-L050 CQ-F050 CQ-D050 500V DC, 50M
Green LED lights up Indicator light Lead wire Oil resistant heavy duty vinyl cord, 6, 0.5mm, 2 wire (Brown, Blue [Red, Black]), 3m Impact resistance 1000m/s Insulation resistance 50M or more at 500VAC (between lead wire and case) Withstand voltage 1000VDC for 1 min.
Green LED lights up Indicator light Lead wire Oil resistant heavy duty vinyl cord, 6, 0.5mm, 2 wire (Brown, Blue [Red, Black]), 3m Impact resistance 1000m/s Insulation resistance 50M or more at 500VAC (between lead wire and case) Withstand voltage 1000VDC for 1 min.
Example: When ordering with an air chuck Lead wire length symbol: 0.5mNil (Example) F9N 3mL (Example) F9NL 5mZ (Example) F9NWZ Auto switches marked "O" are produced upon receipt of order. Note 1) Be careful for the differential of 2-color display type. Refer to "Auto Switch Hysteresis" on page 22.
Electrical entry direction Applicable Electrical entry Indicator Type load Perpendicular F9N F9P F9B F9NV F8N F9PV F8P F9BV F8B 3-wire (NPN) 3-wire (PNP) Solid state (switch) Relay PLC 2-wire 12V Yes Grommet 24V 3-wire (NPN) 3-wire (PNP) F9NWV F9NW Diagnostic indication F9PWV F9PW (2-color display) F9BWV F9BW 2-wire Lead wire length symbols: 0.5mNil (Example) F9N 3mL (Example) F9NL 5mZ
Electrical entry direction Applicable Electrical entry Indicator Type load Perpendicular F9N F9P F9B F9NV F8N F9PV F8P F9BV F8B 3-wire (NPN) 3-wire (PNP) Solid state (switch) Relay PLC 2-wire 12V Yes Grommet 24V 3-wire (NPN) 3-wire (PNP) F9NWV F9NW Diagnostic indication F9PWV F9PW (2-color display) F9BWV F9BW 2-wire Lead wire length symbols: 0.5mNil (Example) F9N 3mL (Example) F9NL 5mZ
Mass Unit: g Auto Switch Internal Circuit D-M9NA(V) D-M9NA(V) 8 D-M9PA(V) 8 D-M9BA(V) 7 Auto switch model 0.5 DC (+) Brown 14 14 13 1 Lead wire length (m) Switch main circuit Switch main circuit Switch main circuit OUT Black 41 41 38 3 68 68 63 5 Dimensions Unit: mm DC () Blue D-M9A M2.5 x 4 l D-M9PA(V) Slotted set screw Indicator light DC (+) Brown SMC 4 OUT Black 2.8 2.7 24 0.2 3 3.2 DC
DC24V IC circuit Relay PLC 3-wire (PNP) DC5V,12V D-M9PAV D-M9PA DC24V DC12V Relay PLC D-M9BAV D-M9BA DC24V 2-wire Isolation resistance i 50M or more at DC500VM (between lead wire and case) Withstand voltage ii AC1000V for 1 minute (between lead wire and case) Operating time i 1ms or less Ambient temperature -1060 Shock resistant 1000 m/s2 Enclosure ii Standard: IEC60529, watertight
DC24V IC circuit Relay PLC 3-wire (PNP) DC5V,12V D-M9PAV D-M9PA DC24V DC12V Relay PLC D-M9BAV D-M9BA DC24V 2-wire Isolation resistance i 50M or more at DC500VM (between lead wire and case) Withstand voltage ii AC1000V for 1 minute (between lead wire and case) Operating time i 1ms or less Ambient temperature -1060 Shock resistant 1000 m/s2 Enclosure ii Standard: IEC60529, watertight
XMA-16-M9NA-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 1 Series XMA, XYA Specifications XMA-16 XMA-25 XYA-25 XMA-40 XYA-40 XMA-50 XYA-50 XMA-63 XYA-63 XMA-80 XYA-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) Fluid Inactive gas under vacuum Operating temperature C 5 to 60 (High temperature type: 5
Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Auto Switch: M9N--Solid State, Gen.
Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: M
Ordering example (SS3J3-V60-l) With plug (24 VDC) SJ3A6N-5MZ-P (2 sets) With plug (24 VDC) SJ3A6N-5MZ-DP (4 sets) SUP/EXH block (D side mounting) 1 3 2 D side U side Stations SS3J3-V60-06D 1 set (Manifold part no.) SJ3A6N-5MZ-DP 4 sets (With plug part no.) SJ3A6N-5MZ-P 2 sets (With plug part no.) The asterisk denotes the symbol for assembly.
SJ3160N-5MZ-C6 2 sets (Single solenoid part no.) SJ3260N-5MZ-C6 4 sets (Double solenoid part no.) The asterisk denotes the symbol for assembly. Prefix to the part no. of the solenoid valve, etc. The valve arrangement is numbered as the 1st station from D side. Indicate the valves to be attached below the manifold part number, in order starting from station 1 as shown in the drawing.
Ordering example (SS3J3-V60-l) With plug (24 VDC) SJ3A6N-5MZ-P (2 sets) With plug (24 VDC) SJ3A6N-5MZ-DP (4 sets) SUP/EXH block (D side mounting) 1 3 2 D side U side Stations SS3J3-V60-06D 1 set (Manifold part no.) SJ3A6N-5MZ-DP 4 sets (With plug part no.) SJ3A6N-5MZ-P 2 sets (With plug part no.) The asterisk denotes the symbol for assembly.
12V 2 wire Connector MY1 5V, 12V 3 wire (NPN) Termina conduit 2 wire 12V Yes 3 wire (NPN) Relay, PLC IC 5V, 12V 24V Diagnostic indication (2 color) 3 wire (PNP) 2 wire 12V Water resistant (2 color) Grommet With timer 3 wire (NPN) IC With diagnostic output (2 color) 5V, 12V 4 wire (NPN) Latching with diagnostic output (2 color) H7LF Lead wire length symbol 0.5m (Example)C80C 5mZ
Pilot type Nil R Internal pilot External pilot How to Order Valve Manifold Assembly Ordering example (SZ3000, Non plug-in) Double solenoid (24 VDC) SZ3260-5MZ-C6 (3 sets) SUP/EXH block (U side mounting) Single solenoid (24 VDC) SZ3160-5MZ-C6 (2 sets) U side D side Stations3 2 1 SS5Z3-60-05U 1 set (Manifold part number) SZ3160-5MZ-C6 2 sets (Single solenoid part no.)