NCQ2/CQ2

D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 x 55L (N)CQ2B12-5S (N)CQ2B12-5T CQ-M3 x 25L 6.5 6.5 -10S (N)CQ2B16-5S (N)CQ2B16-5T CQ-M3 x 25L 5 5 -10S (N)CQ2B20-5S (N)CQ2B20-5T CQ-M5 x 25L 7.5 7.5 -10S (N)CQ2B25-5S (N)CQ2B25-5T CQ-M5 x 30L 9.5 9.5 -10S (N)CQ2B32-5SZ (N)CQ2B32-5TZ CQ-M5 x 30L 9 9 -10SZ (N)CQ2B40-5SZ (N)CQ2B40-5TZ CQ-M5 x 35L 7.5 7.5 -10SZ (N)CQ2B50-10SZ (N)CQ2B50-10TZ CQ-M6 x

Compact Cylinder Series CQS

Example) Bolt M3 x 25L 4 pcs.

Air Cylinder Series CA2

-5A 80 18 0.050 0.093 76.5 5 Polished round 18 66.5 4 4 x 25l CDP-6A 80 100 20 0.065 0.117 83 5 Polished round 20 73 4 4 x 30l CDP-7A 100 25 0.065 0.117 88 5 Polished round 24 78 4 4 x 36l Cotter pin and flat washer are included.

Smooth Cylinder/Low Speed Cylinder

CDP-5A 18 0.050 0.093 76.5 5 Polished round 18 66.5 4 4 x 25l 100 CDP-6A 80 20 0.065 0.117 83 5 Polished round 20 73 4 4 x 30l CDP-7A 100 25 0.065 0.117 88 5 Polished round 24 78 4 4 x 36l Cotter pin and flat washer are included.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D H11 FB TG 0.2 E R MF TF UF L4 Screw size L4 32 F5032 30 7 32.5 50 32 10 64 79 5 M6 x 20L 40 F5040 35 9 38 55 36 10 72 90 5 M6 x 20L 50 F5050 40 9 46.5 70 45 12 90 110 6.5 M8 x 20L 63 F5063 45 9 56.5 80 50 12 100 120 6.5 M8 x 20L 80 F5080 45 12 72 100 63 16 126 153 9 M10 x 25L 100 F5100 55 14 89 120 75 16 150 178 9 M10 x 25L 125 F5125 60 16 110 Max. 157 90 20 180 Max. 224 10.5 M12 x 25L

Air Cylinder

3-wire (NPN) G59W IC circuit Yes Relay, 5 V, 12 V M9PW $ PLC Diagnostic indication 3-wire (PNP) G5PW (2-color indication) M9BW $ 12 V 2-wire K59W 24 V M9NA ? ? ?

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

D H11 FB TG 0.2 E R MF TF UF L4 Screw size L4 32 F5032 30 7 32.5 50 32 10 64 79 5 M6 x 20L 40 F5040 35 9 38 55 36 10 72 90 5 M6 x 20L 50 F5050 40 9 46.5 70 45 12 90 110 6.5 M8 x 20L 63 F5063 45 9 56.5 80 50 12 100 120 6.5 M8 x 20L 80 F5080 45 12 72 100 63 16 126 153 9 M10 x 25L 100 F5100 55 14 89 120 75 16 150 178 9 M10 x 25L D TG R E FB * Supplied with 4 mounting screws.

Made to Order

MY2H L unit S (Absorber stroke) T EY EC EA E Shock absorber SD Stroke adjustment unit FA FB W Adjustment bolt ED TT h E EA EC ED EY FA FB h S T SD TT W Shock absorber model Adjustment range Adjusting bolt Applicable cylinder MY2H16 MY2H25 MY2H40 RB0806 5.6 M5 x 0.8 x 25L 15.8 8.4 6.2 5 28 12.4 30 3.2 40.8 6 1.3 4.2 (Max. 9.8) 34.5 RB1007 11.5 M8 x 1.0 x 35L 19.6 10.6 10 5.5 37 19.3 44.8 4

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor

Compact Cylinder/Guide Rod Type Series CQM

x 30L x 35L x 40L x 45L x 50L M3 x 25L x 30L x 35L x 40L x 45L x 50L M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L M5 x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 110L x 135L M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 115L x 140L M6 x 45L x 50L x 55L x 60L x 65L x 70L x

1

Bore size (mm) Thread size Pulling force N Stroke (mm) 16 M2.5 x 0.45 x 25L or more 4.9 2 Bolt should be detached under normal operation, otherwise it may cause malfunction of the locking feature. Rubber cap 447 Air Cylinder: With End Lock Series CBJ2 Construction (Not able to disassemble) Head end lock !3 !1 Air Cylinders !6 !7 e !5 o !0 i !2 !8 u CJ2 w CM2 CG1 @0 !9 t !

Air Cylinder Series MB

CS2 Bore size (mm) Bolt Width across flats Tightening torque (Nm) 32, 40 MB-32-48-C1247 4 5.1 50, 63 5 11 MB-50-48-C1249 80, 100 MB-80-48AC1251 Foot 6 25 Others MB-80-48BC1251 M12 x 1.75 x 25L Foot 125 8 30.1 Others M12 x 1.75 x 28L 4. When replacing a bracket, tie-rod nuts on the cylinder body may become loosened.

Electric Actuator

Weight [g] Auto Switch Internal Circuit D-M9NA/M9NAV D-M9NA (V) D-M9PA (V) D-M9BA (V) Auto switch model 8 8 7 0.5 DC (+) Brown 14 14 13 1 Lead wire length (m) 41 41 38 3 Main circuit OUT Black of switch 68 68 63 5 Dimensions [mm] DC ( ) Blue D-M9;A M2.5 x 4 L Slotted set screw D-M9PA/M9PAV Indicator light DC (+) Brown SMC 4 Main circuit of switch 2.7 2.8 24 OUT Black 0.2 3.2 4 DC ( ) Blue

Cylinder with Lock

D H11 E FB L4 MF R TF TG 0.2 UF Screw size 32 F5032 30 50 7 5 10 32 64 32.5 79 M6 x 20L 40 F5040 35 55 9 5 10 36 72 38 90 M6 x 20L 50 F5050 40 70 9 6.5 12 45 90 46.5 110 M8 x 20L 63 F5063 45 80 9 6.5 12 50 100 56.5 120 M8 x 20L 80 F5080 45 100 12 9 16 63 126 72 153 M10 x 25L 100 F5100 55 120 14 9 16 75 150 89 178 M10 x 25L D TG R E FB * Supplied with 4 mounting screws UF TF TG MF Single clevis

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

V v v Grommet 2-wire 12 V M9B V V V v v K59 V V v v Terminal conduit 3-wire (NPN) Solid state auto switch G39C G39 2-wire K39C K39 12 V M9NW V V V v v G59W V V v v 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) Relay, PLC Yes 3-wire (PNP) M9PW V V V v v G5PW V V v v 2-wire 12 V M9BW V V V v v 24 V K59W V V v v Grommet 3-wire (NPN) 5 V, 12 V M9NA

Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor:

4/5 Port Solenoid Valve

(Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

XL

Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalogs "SY100" (N219) and "SYJ 300, 500, 700" (N220) XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)