High Vacuum Angle Valve, XL Series Note 2) Solenoid valves Model Initial exhaust valve Main exhaust valve Example XLDV-25 SY114 SY114-1GS XLDV-40, 50, 63, 80 SY114 SYJ314 SYJ314-1GS XLDV 21 Series XLD, XLDV High Vacuum Angle Valve Specifications Model XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-25 XLD(V)-40 Valve type Normally closed (spring return & seal) [both main & initial exhaust valves] Fluid Non-corrosive gas for aluminum
Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.
Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.
Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor
Type: Electromagnetic valve used under high vacuum, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Solenoid Type: Single, Switching Type: 2-Position Normally Closed, Electromagnetic Valve Drive Type: Directly Operated, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 25, Voltage: 100 VAC, Seal Type: Bellows Seal, Sonic Conductance
Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.
Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Auto Switch: w/o Auto Switch and w/o Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 110 VAC, 50/60 Hz, Electrical Entry: L Type Plug Connector,
D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5SZ -10SZ CQ2B40-5SZ -10SZ CQ2B50-10SZ -20SZ CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5TZ -10TZ CQ2B40-5TZ -10TZ CQ2B50-10TZ -20TZ CQ-M3 x 25L x 30L CQ-M3 x 25L x 30L CQ-M5 x 25L x 30L CQ-M5 x 30L x 35L CQ-M5 x 30L x 35L CQ-M5 x 35L x 40L CQ-M6 x 45L x 55L
Example) Bolt M3 x 25L 4 pcs.
Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l
D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 x 55L (N)CQ2B12-5S (N)CQ2B12-5T CQ-M3 x 25L 6.5 6.5 -10S (N)CQ2B16-5S (N)CQ2B16-5T CQ-M3 x 25L 5 5 -10S (N)CQ2B20-5S (N)CQ2B20-5T CQ-M5 x 25L 7.5 7.5 -10S (N)CQ2B25-5S (N)CQ2B25-5T CQ-M5 x 30L 9.5 9.5 -10S (N)CQ2B32-5SZ (N)CQ2B32-5TZ CQ-M5 x 30L 9 9 -10SZ (N)CQ2B40-5SZ (N)CQ2B40-5TZ CQ-M5 x 35L 7.5 7.5 -10SZ (N)CQ2B50-10SZ (N)CQ2B50-10TZ CQ-M6 x
Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Auto Switch: M9N--Solid State, Gen.
Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.
Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: L
Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor:
Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125S 10S CQSB165S 10S CQSB205S 10S CQSB25-5S 10S 6.5 6.5 6.5 8.5 Single acting/Spring extend Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125T 10T CQSB165T 10T CQSB205T 10T CQSB255T 10T 6.5 6.5 6.5 8.5 Note) The
MHY2 MHW2 MRHQ Limitations of Holding Point Auto switch MHK2-12l MHKL2-12l MHK2-16l MHKL2-16l MHK2-20l MHKL2-20l MHK2-25l MHKL2-25l 120 60 100 60 Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) 100 50 50 Pressure 0.2MPa 80 Pressure 0.2MPa 40 40 80 Pressure 0.2MPa Pressure 0.2MPa 60 30 30 60 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.3MPa 0.4MPa 0.5MPa
-5A 80 18 0.050 0.093 76.5 5 Polished round 18 66.5 4 4 x 25l CDP-6A 80 100 20 0.065 0.117 83 5 Polished round 20 73 4 4 x 30l CDP-7A 100 25 0.065 0.117 88 5 Polished round 24 78 4 4 x 36l Cotter pin and flat washer are included.