High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

XL-OMY0002

XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 63, Flange Type: D [K(DN)], Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF(NW), Port Direction: M (w/o Indicator, Right Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Right Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -,

XLDV Series

(The conductance is shown as a guide only.) 32 Initial pumping conductance 30 28 L/s () P=0.1MPa XLD-100 XLD-160 XLDV-100 XLDV-160 26 Initial pumping valve conductance l/s (Viscous flow) Shows flow rate 24 22 20 XLDV-63 XLDV-80 XLD-63 XLD-80 18 16 14 XLD-50 XLDV-50 12 10 XLDV-40 XLD-40 8 when P=0.1MPa 6 4 XLD-25 XLDV-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0

XMD/XYD Series

Step 4 Step 5 O ring S valve M valve Needle seat (XLD-25) S valve seal assembly (XLD-40,50) S valve seal assembly (XLD-63,80) Wipe off the dust of the S valve and around it. Remove dust from the needle seat or S valve seal assembly. For size 25, 40 and 50, remove the dust from the initial pumping valve seal O ring.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 63, Flange Type: D [K(DN)], Port Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen.

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: Non-standard Indicator, Body Surface

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: Non-standard Indicator, Body Surface

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 50, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std.

2

, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 420, 440, 480 VAC (50 Hz) 420 to 520 VAC (60 Hz) 220 VAC (50 Hz) 220 to 240 VAC (60 Hz) 380, 400, 415 VAC (50 Hz) 380 to 400, 400 to 415, 415 to 440 VAC (60 Hz) 440, 460 VAC (50 Hz) 440 to 460, 460 to 500 VAC (60 Hz) Outlet voltage Symbol 500 1 500 VA 100 VAC (50 Hz) 100, 110 VAC (60 Hz) 1000 2 1 kVA Singlephase 2000 2 kVA 3 4 9 200 VAC (50 Hz

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

Direct Solenoid

Voltage to Operaie (on 60 cycles) DC 8090 B70h 13.2 13.2 OIRECT SOLEI{OIO OPERA'ED: The solenoid operates tho spool directly, and a spring returns the spool and solenoid plunger when the solenoid is de-enrgized RESFO SE Time to Energizq (Sconds) 0.018 0.017 o.ga 0.025 0.012 0.012 0.018 0.018 0.015 0.015 0.025 0.025 0.0r7 0.016 0.023 0.023 1r5/50 1n/@ 1 15/50 120r'@ The sOool has no seals,