Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal

Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 50, Flange Type: KF(NW), Port Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, 0.5M, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 50, Seal Type: Bellows Seal, Sonic Conductance: 80L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-A93 reed auto

High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 B XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

Aluminum High Vacuum Angle Valve

A Section Thread Tightening Torque Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-100 XLD(V)-160 XLD(V)-80 Tightening torque 0.08 Nm (0.8 kgfcm) or less 0.3 Nm (3 kgfcm) or less 451 A XLD/XLDV Series Dimensions XLD/Air operated (b) E C D E C Fn (KF flange) (K flange) Fd (a) (c) Heater (Option) E Auto switch (Option) J K H S M B G A A (mm) A B C D E Fn Fd G H J K Model XLD-25 XLD-40

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

XL-OMY0002

XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

XLDV Series

(The conductance is shown as a guide only.) 32 Initial pumping conductance 30 28 L/s () P=0.1MPa XLD-100 XLD-160 XLDV-100 XLDV-160 26 Initial pumping valve conductance l/s (Viscous flow) Shows flow rate 24 22 20 XLDV-63 XLDV-80 XLD-63 XLD-80 18 16 14 XLD-50 XLDV-50 12 10 XLDV-40 XLD-40 8 when P=0.1MPa 6 4 XLD-25 XLDV-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0

XMD/XYD Series

Step 4 Step 5 O ring S valve M valve Needle seat (XLD-25) S valve seal assembly (XLD-40,50) S valve seal assembly (XLD-63,80) Wipe off the dust of the S valve and around it. Remove dust from the needle seat or S valve seal assembly. For size 25, 40 and 50, remove the dust from the initial pumping valve seal O ring.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen.

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen.

Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 25, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

2

(C) Correction factor 1.25 1.11 1 0.90 0.63 2 to 25 30 32 35 40 2 to 25 30 32 35 40 45 2 to 25 30 32 35 40 2 to 25 30 32 35 40 2 to 25 30 32 35 40 Note) For the water-cooled type, the correction factor is determined to 1 in an ambient temperature range of 2 to 45C.

High Vacuum Angle Valve

0 Air operated, With solenoid valve XLAV e Indicator/Solenoid valve direction w Flange type q Flange size Symbol Indicator Solenoid valve direction F With indicator Size 16 25 40 50 63 80 Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80 D K (DN) 63, 80 Rear flange surface Left flange surface G Rear flange surface J Right flange surface K Without indicator Right flange

Direct Solenoid

Th cov6r cannot b rotabd on iha bodv, OBINGMANIFOLD MOUNTING PATTEBN PIPETAPIS I/E'NPTFOT 1/4" NPTF AS SPECINED BYMODEL NUMgER DIMENSIONS A B c D E F G H J K M N P R s 5.4 (128) 2.40 (61) 1.77 (4s) 0.94 (211 0.24 (6) o.a1 (8) 228 (58) 0.8:l (211 2.13 (54) o.a7 (221 1.06 en 0.98 (25) 0.39 (10) 0.79 (20) 0.98 (25) Millimeters In Parentheses PARTS LIST O.ldl n t Noi.qt rYa 316 1 Eody Al3rnbly-ri

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 25, Seal Type: Bellows Seal, Sonic Conductance: 14L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: No auto-switch

Please contact us for the latest version.sales@ocaire.com, O-RING (XLD-100D-X510), VACUUM SERIES, XLD HIGH VACUUM VALVE, 21, XLD NO SIZE RATING, 0.022 lb