], Seal Replacement: A (2-3-4)

Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 150°C, No Heater, Version: Refresh, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: X, Body Surface Treatment: External: Hard Anodized - Internal: Oxalic Acid Anodized, Seal Material: Q1 [KALREZ® (4079)], Seal Replacement: 2-

40, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 150°C, No Heater, Version: Refresh, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: X, Body Surface Treatment: External: Hard Anodized - Internal: Raw Material, Seal Material: Q1 [KALREZ® (4079)], Seal Replacement: 2-

Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

High Vacuum Angle Valve

Please contact SMC for details. 7 Aluminum High Vacuum Angle Valve XLC Series Specifications Model XLC-16-2 XLC-25-2 XLC-40-2 XLC-50-2 XLC-63-2 XLC-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLC 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] 1 x 106 to atmospheric pressure Conductance

XL

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

High Vacuum Angle Valve, XL Series

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

XL-OMV0002

-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5) 4 XL-OMV0002 510 O 0.1mm0.2mm Assy O 5 P11 O 6 (P12P14)

High Vacuum Angle Valve

Please contact SMC for details. 7 Aluminum High Vacuum Angle Valve XLC Series Specifications Model XLC-16-2 XLC-25-2 XLC-40-2 XLC-50-2 XLC-63-2 XLC-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLC 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] 1 x 106 to atmospheric pressure Conductance

XL-OMV0005

Part No.: X L 1 A 2 1 0 1 Table 1. Valve size Table 2. Seal material option Applicable product No. Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.

This is a legacy product, and replaced byXLC-40H0-2

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

) 4 (A6063) C C C C D D D D Body (material: A6063) K C C C C E E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance

This is a legacy product, and replaced byXLC-40-2 XLC HIGH VACCUM VALVE. HIGH VACUUM VALVE. VACUUM SERIES. XLC NO SIZE RATING. 2.89186 lb. 2X.

Please contact us for the latest version.sales@ocaire.com, XLC NO SIZE RATING, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 9.84732 lb

Please contact us for the latest version.sales@ocaire.com, XLC NO SIZE RATING, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 1.10231 lb

Please contact us for the latest version.sales@ocaire.com, XLC NO SIZE RATING, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 1.51874 lb

Please contact us for the latest version.sales@ocaire.com, XLC NO SIZE RATING, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 3.08647 lb

Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 1.10231 lb

Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 2.72431 lb