Flange Size: 16, Flange Type: KF(NW), Port Direction: Left Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

IDX-OM-M050

Inside diameter 25 approx. 2m) (The opposite side 4Eye bolt (O.D.10, Length Compressed air outlet JIS flange 65A 10K For Option K 16K 4x 20 Drain tube direction(Nil) Drain tube Ventilation approx. 0.7m) condensed water Drain tube for (O.D.10, Length 9351 78 18 267 8x 19 4x 19 A A Flange bolt hole Drawing of view A 1130 140 1120 140 655 Other than 18 Option K Option K Model 75 direction

IDX-OM-M051

(O.D.10, Length approx. 2m) Inside diameter 25 Compressed Air outlet (The opposite side (For Option K: 16K) 4xEye bolt condensed water JIS flange 80A 10K Drain tube for Drain tube Drain tube 268 t 217 20 18 t A A 8x23 8x19 20 Flange bolt hole Drawing of view A 75 4x 1056 720 9351 1290 160 150 t Other than Option K Option K Model (For Option K: 16K) Compressed Air inlet JIS flange 80A 10K

High Vacuum Angle Valve

1 CE-compliant Q CE-compliant Nil 421 B XLC/XLCV Series Specifications Model XLC(V)-16 XLC(V)-25 XLC(V)-40 XLC(V)-50 XLC(V)-63 XLC(V)-80 XLC-100 XLC-160 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum XLC 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLCV 5 to 50 1 x 10-6 to atmospheric pressure Operating pressure (Pa

XL

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

Aluminum High Vacuum Angle Valve

1 CE-compliant Q CE-compliant Nil 421 XLC/XLCV Series Specifications Model XLC(V)-16 XLC(V)-25 XLC(V)-40 XLC(V)-50 XLC(V)-63 XLC(V)-80 XLC-100 XLC-160 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum XLC 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLCV 5 to 50 1 x 10-6 to atmospheric pressure Operating pressure (Pa)

XL-OMV0002

-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5) 4 XL-OMV0002 510 O 0.1mm0.2mm Assy O 5 P11 O 6 (P12P14)

High Vacuum Angle Valve, XL Series

209 250 E Note 1) A 40 50 65 70 88 90 J 26 28 36 38 45 56 Model XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve

Please contact SMC for details. 7 Aluminum High Vacuum Angle Valve XLC Series Specifications Model XLC-16-2 XLC-25-2 XLC-40-2 XLC-50-2 XLC-63-2 XLC-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLC 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] 1 x 106 to atmospheric pressure Conductance

XL-OMV0005

Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

Vale specifications Model XLC-25 XLC-40 Flange (valve) size 25 40 Actuating type Double acting/ activated by applying pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/

Please contact us for the latest version.sales@ocaire.com, XLC NO SIZE RATING, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 9.84732 lb

Please contact us for the latest version.sales@ocaire.com, XLC NO SIZE RATING, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 1.10231 lb

Please contact us for the latest version.sales@ocaire.com, XLC NO SIZE RATING, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 1.51874 lb

Please contact us for the latest version.sales@ocaire.com, XLC NO SIZE RATING, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 3.08647 lb

This is a legacy product, and replaced byXLC-40-2 XLC HIGH VACCUM VALVE. HIGH VACUUM VALVE. VACUUM SERIES. XLC NO SIZE RATING. 2.89186 lb. 2X.

Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 1.10231 lb

Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 2.72431 lb

Please contact us for the latest version.sales@ocaire.com, HIGH VACUUM VALVE, VACUUM SERIES, XLC HIGH VACCUM VALVE, 2X, XLC NO SIZE RATING, 11.92306 lb

Please contact us for the latest version.sales@ocaire.com, BONNET ASSY, VACUUM SERIES, XLC HIGH VACCUM VALVE, 21, XLC NO SIZE RATING, 2.42508 lb