Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Right Flange Surface, Std. Indicator, Right Flange Surface, Version: None, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: G [Grommet

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

DC24V DC12V Relay PLC D-M9BAV D-M9BA DC24V 2-wire Isolation resistance i 50M or more at DC500VM (between lead wire and case) Withstand voltage ii AC1000V for 1 minute (between lead wire and case) Operating time i 1ms or less Ambient temperature -1060 Shock resistant 1000 m/s2 Enclosure ii Standard: IEC60529, watertight: IP67(JISC0920) 36 - Proper auto switch mounting position and

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

DC24V DC12V Relay PLC D-M9BAV D-M9BA DC24V 2-wire Isolation resistance i 50M or more at DC500VM (between lead wire and case) Withstand voltage ii AC1000V for 1 minute (between lead wire and case) Operating time i 1ms or less Ambient temperature -1060 Shock resistant 1000 m/s2 Enclosure ii Standard: IEC60529, watertight: IP67(JISC0920) 32 - Proper auto switch mounting position and

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge

Digital Flow Switches

output NPN or PNP open collector (same as switch output) Illuminates up when output is ON OUT1: Green; OUT2: Red 1 sec. or less Hysteresis mode: Variable (can be set from 0), Window comparator mode Note 6): 3-digit fixed 12 to 24 VDC (ripple 10% or less) IP65 Operating: 0 to 50C, Stored: 25 to 85C (with no freezing and condensation) 1000 VAC for 1 min. between external terminal and case 50M

Digital Flow Switches

output) Lights up when output is ON OUT1: Green; OUT2: Red 1sec. or less Hysteresis mode: Variable (can be set from 0), Window comparator mode: 3-digit fixed Note 5) Status LED's Response time Hysteresis Power supply voltage 12 to 24VDC (ripple 10% or less) IP65 Operating: 0 to 50C, Stored: 25 to 85C (with no condensation and freezing) 1000VAC for 1 min. between external terminal and case 50M

Digital Flow Switches, Series PF2A, Series PF2W

output) Lights up when output is ON OUT1: Green; OUT2: Red 1sec. or less Hysteresis mode: Variable (can be set from 0), Window comparator mode: 3-digit fixed Note 5) Status LED's Response time Hysteresis Power supply voltage 12 to 24VDC (ripple 10% or less) IP65 Operating: 0 to 50C, Stored: 25 to 85C (with no condensation and freezing) 1000VAC for 1 min. between external terminal and case 50M

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: M (w/o Indicator, Right Flange Surface, Std.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 50, Flange Type: KF (NW), Valve Direction: w/o Indicator, Right Flange Surface, Std. Indicator, Right Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: w

High Vacuum L Type Valve

-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

Battery-less

Make sure workpieces mounted on the table do not interfere with other workpieces or the facilities around the table. *3 Position after returning to origin *4 [ ] for when the direction of return to origin has changed Model L A B n D E Without lock With lock LEFS32Em-50m 332 384 56 180 4 LEFS32Em-100m 382 434 106 230 4 LEFS32Em-150m 432 484 156 280 4 LEFS32Em-200m 482 534 206 330 6

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: M9N--Solid State, Gen.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 50, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: M9N--Solid State, Gen.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: M9N--Solid State, Gen.