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Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Proposals for Energy Saving

Flow coefficient Port size Rc Proof pressure MPa Max. system pressure MPa Max. operating pressure differential MPa Weight g Orifice mm Cv Effective area mm Model N.C. 1/8 (6A) 2 0 VXA213 2 0 VXA212 2 0 VXA213 2 0 VXA223 2 0 VXA224 2 0 VXA225 2 0 VXA226 2 0 VXA223 2 0 VXA224 2 0 VXA225 2 0 VXA226 2 0 VXA226 2 0 6 1.0 0.5 1.0 1.0 0.33 0.61 0.33 3 4.5 3 VXA212 11 6 170 0.5 1.0 0.6 0.2 0.1 1.0

Table of Contents

3.4 through 2-6.5 counterbore depth 3.3 2-M4 x 0.7 4-M3 x 0.5 2-M3 x 0.5 thread depth 5 M3 x 0.5 x 10l CXS10 7.5 8 46 17 44 15 2-M4 x 0.7 35 20 4 20 6 33.6 8.5 7 M5 x 0.8 x 5l 30 thread depth 7 thread depth 4.5 2-4.3 through 2-8 counterbore depth 4.4 2-M5 x 0.8 4-M4 x 0.7 2-M4 x 0.7 thread depth 6 M5 x 0.8 x 10l CXS15 9 10 58 20 56 18 2-M5 x 0.8 45 25 5 30 8 48 10 10 M6 x 1.0 x 5l 38.5 thread

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 17.2 10.2 3.6 3.6 XLAV-25-2 46 21.4 10.2 3.6 3.6 XLAV-40-2 54.5 33.9 10.2 3.6 3.6 XLAV-50-2 61 38.2 10.2 3.6 3.6 XLAV-63-2 80.5 43.8 12 4 2 XLAV-80-2 90.5 59.8 12 4 2 6 A Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Digital Flow Switch Series PFA For Air Series PFW For Water

PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min]

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: L (w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface), Version: None, Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector)

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/o Indicator, Rear Flange Surface; Std. Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: L Type Plug Connector, Surge Suppressor: -, Non-standard

Compact Cylinder

Order no. 2.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 40l 2 pcs.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Example) Bolt M3 x 40l 2 pcs.

NCQ2/CQ2

2, !3, !

Compact Cylinder Series CQS

Basic style (Through-hole/Both ends tapped common): CQSK/CDQSK 12 16 Auto switch H thread effective depth C 2 x 2 x OB counterbore Minimum lead wire bending radius 10 2 x M5 x 0.8 2 x 2 x OA effective depth RA Note) 2 x N through Width across flats Flat washer 2 pcs.

CQS

2, !3, !4.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

M5 x 0.8 (Relief port) 2 x 2 x 6.5 counterbore M4 x 0.7 effective depth 8 (Piping port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 38 2 x 3.5 through 8 29 20 0.5 Flat washer 6 10 4 4 20 27 + Stroke 3.5 29 30.5 + Stroke 20 2 x 2 x 9 counterbore M5 x 0.8 effective depth 7 18 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 5.5 2 x 2 x M6 x 1.0 effective depth 10 Note 3) 2 x 5.4 through

CQS

(2 color) D-F9PW 5.3-66 3 wire, PNP, In-line (2 color) D-F9BW 5.3-66 2 wire, In-line(2 color) Solid state switch D-F9NV 5.3-39 3 wire, NPN, Perpendicular D-F9PV 5.3-39 3 wire, Water resistant D-F9BV 5.3-39 2 wire, Perpendicular D-F9NWV 5.3-66 3 wire, NPN, Perpendicular(2 color) D-F9PWV 5.3-66 3 wire, Water resistant(2 color) D-F9BWV 5.3-66 2 wire, Perpendicular(2 color) D-F9BAL 2 wire, In-line