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Equipment w e q Digital flow switch for air Air leakage tester Compact manometer Equipment Equipment Equipment Equipment q w Air leakage tester Main Points w Measure air leakage rate and air blow rate Air leakage tester. (Made to order) Page 133 q Measure main line and branch line flow rates. Digital flow switch for air Series PFA Page 84 e Measure air blow rate.

Maximum operating pressure 0.55MPa 0.1MPa 0.55MPa 0.55MPa Minimum operating pressure 0.1MPa -0.1MPa 0.1MPa 0MPa Response time 5ms or less 5ms or less 5ms or less ON: 3.5ms, OFF: 2ms 24VDC 0.7W (29mA) 0.7W (29mA) Coil rated voltage Power consumption (Current) Note 2) 1W (42mA) 1W (42mA) Note 2) 12VDC 0.7W (58mA) 0.7W (58mA) Note 2) 1W (83mA) 1W (83mA) Note 2) Electrical entry L type plug connector

N.C. 0.55MPa 0.1MPa 0.55MPa 0.55MPa 0.1MPa -0.1MPa 0.1MPa 0MPa 5ms 5ms 5ms ON3.5ms OFF2ms DC24 0.7W29mA2 0.7W29mA2 1W42mA 1W42mA DC12 0.7W29mA2 0.7W58mA2 1W83mA 1W42mA L M 3 10.30.4 23.1W10ms 0.7W 3/M 32 - No.ZB-OM00301 1 03M 04M 05M 06H N.C. N.C. N.C. N.C.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2, Auto Switch: M9B--Solid State, Gen.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: 2, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: M Type Plug Connector, Surge Suppressor: w/Surge Voltage

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Frequency Port size (Nominal size) Piston style 0.15 to 1.0MPa 5 to 60C (No freezing) VM/VR Red Green Orange Rc(PT) (6A) 40g VH 300 c.p.m or less R(PT) (6A) 1 8 1 8 Weight 6g Construction/Component Parts Construction/Component Parts w q Description Aluminum alloy Material Notes No. w q Description Brass Material Notes No.

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

(Refer to paragraph (2) of this section.) 4) When the reset (RES) is switched on, the base circuit is shut off and the servo motor shaft coasts. (2) Timing chart Servo-on (SON) accepted (1.5 to 2s) Main circuit Control circuit Power supply OFF ON Base circuit OFF ON 10ms 10ms 95ms Servo-on(SON) OFF ON 95ms ON OFF Reset(RES) 10ms 5ms 10ms 5ms 5ms 10ms OFF ON Ready(RD) Yes (OFF) No (ON) Trouble

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE E210 & N320 1.123 LINEAR ACTUATOR: COMPACT CYLINDER SERIES NCQ2/CQ2 A C C E S S O R I E S ( M M ) S E R I E S N C Q 2 / C Q 2 S I N G L E R O D C L E V I S ( R O D E Y E ) A C C E S S O R I E S ( M M ) S E R I E S N C Q 2 / C Q 2 D O U B L E R O D C L E V I S ( R O D E Y E ) CQ2 SINGLE ROD

SIGNALS AND WIRING (2) Timing chart Servo-on (SON) accepted (1 to 2s) Main circuit Control circuit Power supply OFF ON Base circuit OFF ON 10ms 10ms 95ms Servo-on (SON) OFF ON 95ms ON OFF Reset (RES) 10ms 5ms 10ms 5ms 5ms 10ms OFF ON Ready (RD) Yes (OFF) No (ON) Trouble (ALM) 1s Power-on timing chart (3) Forced stop Configure a circuit which interlocks with an external emergency stop switch

(RD)((2)) (RY(n1)ARY(n3)A) (2) (RYn0) ON(RYn0) (22.5s) OFF ON ON(RYn0) (RY(n 1)A RY(n3)A) RD OFF ON 10ms 10ms 95ms (RYn0) OFF ON 95ms (RY(n1)A RY(n3)A) ON OFF 10ms 5ms 10ms 5ms 5ms 10ms OFF ON (RD) 4 8 4 (3) EMGEMG (E6) (EMG) (RYn1)(RYn2) RYn1RYn2 DC24V DICOM () DOCOM EMG .4.8.3 4 9 4 4.3.3 CNP1CNP2CNP3 13.913.1 CNP1CNP2CNP3 (1) LECSC(A) () CNP1 CNP1 54928-0670(Molex) 54928

7 w @5 q y !3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.