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How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

M Q Q Note) D is maximum diameter.

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

Indicator: Standard, Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: FKM (1349-80), Seal Replacement: None, CE-Compliant: Q (CE-Compliant)

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: M9B--Solid State, Gen.

Indicator: X (Non-standard Indicatior), Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: Q1 (Kalrez®, 4079), Seal Replacement: A (Valve Seal 1, Valve Seal 2, Exterior Seal), CE-Compliant: Q (CE-Compliant)

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2, Auto Switch: M9B--Solid State, Gen.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2, Auto Switch: M9B--Solid State, Gen.

Indicator: X (Non-standard Indicatior), Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: Q1 (Kalrez®, 4079), Seal Replacement: A (Valve Seal 1, Valve Seal 2, Exterior Seal), CE-Compliant: Q (CE-Compliant)

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2, Auto Switch: M9B--Solid State, Gen.

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2, Auto Switch: M9N--Solid State, Gen.

Suppressor, Non-polar Type), Non-standard Indicator: Standard, Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: FKM (1349-80), Seal Replacement: None, CE-Compliant: Q (CE-Compliant)

Suppressor), Non-standard Indicator: Standard, Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: FKM (1349-80), Seal Replacement: None, CE-Compliant: Q (CE-Compliant)

Suppressor), Non-standard Indicator: Standard, Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: FKM (1349-80), Seal Replacement: None, CE-Compliant: Q (CE-Compliant)