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Part Number Description: HIGH VACUUM VALVE Product Line: Z Product Line Description: VACUUM SERIES Family Code: 681 Family Description: XLA HIGH VACUUM VALVE Class Code: 2X Part Code: 1 Reference Code: L PDF Documentation: Datasheet Click here to report information errorImage shown may not match exact part number
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: F (w/Indicator, Left Flange Surface), Version: 2, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: Z (w/Light & Surge
Valve Type: Normally Closed, Bellows Seal, Flange Size: 25, Flange Type: KF (NW), Valve Direction: w/Indicator, Left Flange Surface, Version: 2, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: w/Light & Surge Voltage Suppressor
4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1 VZ110 can be mounted on VV4Z1-25 and VV4Z1-25F .
VZ110 can be mounted on VV4Z1-25 and VV4Z1-25F .
VZ110 can be mounted on VV4Z1-25 and VV4Z1-25F .
Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Performance Curves/Air Operated Type PA513 Flow rate characteristics PA313 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2MPa) SUP=0.5MPa 40 40 SUP=0.5MPa
Look up from the 5Hz switching cycle to find the intersection with SUP=0.35MPa. 2. From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 9l/min (ANR). 1 0 2 3 4 5 6 7 8 9 10 Cycle (Hz) Caution 1. These flow rate characteristics are for fresh water (viscosity 1mPas, specific gravity 1.0). 2.
Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Performance Curves/Air Operated Type PA513 Flow rate characteristics PA313 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2MPa) SUP=0.5MPa 40 40 SUP=0.5MPa
H N I C A L SPECIFICATIONS S E R I E S VQZ100/200/300 Type Of Seal Metal Seal Rubber Seal Fluid Air, Inert Gas Air, Inert Gas Maximum Operating Pressure 0.7MPa / 102PSI (High Pressure Type 0.8MPa / 116PSI) Valve Specifications Solenoid Specifications Minimum Operating Pressure 0.1MPa / 14.5PSI 0.15MPa / 22PSI Ambient & Fluid Temperature -10 to 50C -10 to 50C Max Operating Frequency 20Hz 5Hz
H N I C A L SPECIFICATIONS S E R I E S VQZ100/200/300 Type Of Seal Metal Seal Rubber Seal Fluid Air, Inert Gas Air, Inert Gas Maximum Operating Pressure 0.7MPa / 102PSI (High Pressure Type 0.8MPa / 116PSI) Valve Specifications Solenoid Specifications Minimum Operating Pressure 0.1MPa / 14.5PSI 0.15MPa / 22PSI Ambient & Fluid Temperature -10 to 50C -10 to 50C Max Operating Frequency 20Hz 5Hz
Discharge capability 1) Flow-rate characteristics PB1313A Flow-rate characteristics (5Hz) PB1313A5Hz 0.5 SUP=0.5MPa Discharge pressure (MPa) 0.4 SUP=0.4MPa MPa 0.3 SUP=0.3MPa 0.2 SUP=0.2MPa 0.1 0 0 200 400 600 800 1000 Discharge rate (mL/min) mL/min Caution -The above flow characteristic graph is for clean water (viscosity 1mPas, specific gravity 1.0).
Clean room Assembled and double-packaged in clean-room environment Note) With 3/8" inlet/outlet tube: 1 to 12l * The values appearing in the above table are representative of use in a room temperature environment and with tap water. 3 Series PA3000 Performance Automatically operated type Air pilot actuation type * Solenoid valve switching cycle PA3313-m03: Flow rate characteristics (5Hz
Discharge capability 1) Flow-rate characteristics PB1013A Flow-rate characteristics (5Hz) PB1013A flow-rate characteristics (When operated at PB1013A5Hz 5H ) 0.7 Discharge pressure (MPa) 0.6 SUP=0.7MPa 0.5 MPa SUP=0.5MPa 0.4 SUP=0.35MPa 0.3 SUP=0.2MPa 0.2 0.1 0 0 200 400 600 800 1000 Discharge rate (mL/min) mL/min Caution The above flow characteristic graph is for clean water (viscosity
Internal pilot: 1 to 5HZ and external pilot: 1 to 8Hz is reference. The charts on page 10 show the relation for the adjustment needle value and operation frequency. However, there is approx. 2Hz of variation depending on individuality. Operating conditions affect the operating frequency.
The ionizer generates ion at the preset frequency. 0: 1Hz 1: 3Hz 2: 5Hz 3: 10H 4: 15Hz 5: 20Hz 6: 30Hz 7: 60Hz Operation with pulse + Ion Ion (e.g.) Charged workpiece: Charged in negative Static neutralization is completed (6) Wiring of Power supply cable Connect the special power supply cable to the unit.