ZP

Applicable pad 06J/B10J/B15J 18 15.5 15.5 4.9 7.7 6.5 6.5 25 R 2.8 6 7 8 10 6.8 2.5 3 9 10 25 2 0.5 6 7 R 11 12 R 2.5 3.8 4.9 ZP2-14J ZP2-B15J ZP2-16J Lock ring Lock ring 13 13 Applicable pad 09J/14J/16J 7 30 R R 24 24 15.5 15 7 8 15 R R 18 6.5 45 1 15 11.8 2.5 15 14 3 17.5 16 7.2 4 2.5 4.5 5 6.6 R 16 17 Applicable pad B25J/B30J ZP2-B25J ZP2-B30J 15 Lock ring 30 R Lock ring 15 R 8 9 R R 45

ZP

Applicable pad 06J/B10J/B15J 18 15.5 15.5 4.9 7.7 6.5 6.5 25 R 2.8 6 7 8 10 6.8 2.5 3 9 10 25 2 0.5 6 7 R 11 12 R 2.5 3.8 4.9 ZP2-14J ZP2-B15J ZP2-16J Lock ring Lock ring 13 13 Applicable pad 09J/14J/16J 7 30 R R 24 24 15.5 15 7 8 15 R R 18 6.5 45 1 15 11.8 2.5 15 14 3 17.5 16 7.2 4 2.5 4.5 5 6.6 R 16 17 Applicable pad B25J/B30J ZP2-B25J ZP2-B30J 15 Lock ring 30 R Lock ring 15 R 8 9 R R 45

ZP

Applicable pad 06J/B10J/B15J 18 15.5 15.5 4.9 7.7 6.5 6.5 25 R 2.8 6 7 8 10 6.8 2.5 3 9 10 25 2 0.5 6 7 R 11 12 R 2.5 3.8 4.9 ZP2-14J ZP2-B15J ZP2-16J Lock ring Lock ring 13 13 Applicable pad 09J/14J/16J 7 30 R R 24 24 15.5 15 7 8 15 R R 18 6.5 45 1 15 11.8 2.5 15 14 3 17.5 16 7.2 4 2.5 4.5 5 6.6 R 16 17 Applicable pad B25J/B30J ZP2-B25J ZP2-B30J 15 Lock ring 30 R Lock ring 15 R 8 9 R R 45

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: J (w/Indicator, Right Flange Surface), Version: 2, Auto Switch: M9// (w/o Auto Switch w/Built-in Magnet), Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: S (w/Surge Voltage

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: J (w/Indicator, Right Flange Surface), Version: 2, Auto Switch: M9B--Solid State, Gen.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/Indicator, Right Flange Surface, Version: 2, Auto Switch: w/o Auto Switch w/Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: w/Surge Voltage Suppressor, Non-standard

Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/Indicator, Right Flange Surface, Version: 2, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: w/Surge Voltage Suppressor, Non-standard

High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

High Vacuum L Type Valve

-16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4

High Vacuum Angle Valve

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

Aluminum High Vacuum Angle Valve

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

XL

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

High Vacuum Angle Valve, XL Series

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

Programless controller Step motor (servo 24 VDC)

LESH8J,16J LESH8K,16K LESH25J LESH25K speed acceleration speed acceleration speed acceleration speed acceleration [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] [mm/s] [mm/s2] 0 20 300 10 300 20 300 10 300 1 25 400 13 400 25 400 15 400 2 30 500 15 500 30 500 20 500 3 40 600 20 600 40 600 30 600 4 50 700 25 700 50 700 40 700 5 60 800 30 800 60 800 50 800 6 70 900 35 900 70 900 60 900 7 80 1000

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Option: G (Round Type Pressure Gauge w/Limit Indicator), Attachment: V1 (3-Port Valve for Residual Pressure Release; Mounting: V+AF+AR), Semi-Standard 1: 16J (1 + 6 + J), Semi-Standard 2: RZ (R + Z)

Body Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Option: Standard, Attachment: V1 (3-Port Valve for Residual Pressure Release; Mounting: V+AF+AR), Semi-Standard 1: 16J (1 + 6 + J), Semi-Standard 2: RZ (R + Z)

Vacuum Gripper

ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J

Vacuum Gripper

ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J

Vacuum Gripper

ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J

Vacuum Gripper

ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B-7A-X2 8 8 8 9 ZP16B ZP 20 B ZPG20B-7A-X2 11 11 11 13 ZP20B ZPT3-7A-X2 ZP 25 B ZPG25B-7A-X2 11 12 12 14 ZP25B ZP 32 B ZPG32B-7A-X2 14 15 15 18 ZP32B ZP 20 UT ZPG20UT-7A-X2 4 4 4 4 ZPT1-A6 ZP2-20UT ZP 16 J ZPG16J-7A-X2 8 8 8 9 ZPT2-7A-X2 ZP2-16J