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XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2, Auto Switch: M9B--Solid State, Gen.

Valve Type: Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: 2, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: M Type Plug Connector, Surge Suppressor: w/Surge Voltage

Note 2) Without valve mechanism. q 00 10 20 30 40 e w w q w q q w e q w (1) Numbers in K indicate the constructing order from the left hand side (upper stream) with a view from front. Ex.) Symbol 00 AF+AR+AL 10 AW+AL (Available only for AC1010 to 4010.) 20 AF+AR 30 AF+AFM+AR (Available only for AC2030 to 4030.)

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

XLA XLAV/With solenoid valve J XL XL XLQ XM XY M N Port P (Pressure port) Port R (Exhaust port) DXSA K L XVD XGT CYV (mm) (mm) J K L M N J K L M N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 Model XLAV-63 XLAV-80 XLAV-100 XLAV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 50.7 12 4 2 57 24.6 10.2 3.6 3.6 128.5 57.7 12 4 2 Other dimensions

A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16

(Refer to paragraph (2) of this section.) 4) When the reset (RES) is switched on, the base circuit is shut off and the servo motor shaft coasts. (2) Timing chart Servo-on (SON) accepted (1.5 to 2s) Main circuit Control circuit Power supply OFF ON Base circuit OFF ON 10ms 10ms 95ms Servo-on(SON) OFF ON 95ms ON OFF Reset(RES) 10ms 5ms 10ms 5ms 5ms 10ms OFF ON Ready(RD) Yes (OFF) No (ON) Trouble

Equipment w e q Digital flow switch for air Air leakage tester Compact manometer Equipment Equipment Equipment Equipment q w Air leakage tester Main Points w Measure air leakage rate and air blow rate Air leakage tester. (Made to order) Page 133 q Measure main line and branch line flow rates. Digital flow switch for air Series PFA Page 84 e Measure air blow rate.

Miniature Regulator ARJ1020F Standard Specifications Compact and lightweight (16g) Low cracking pressure 0.02MPa Standard model equipped with backflow function ARJ1020F Model M5 (Male thread) IN side Port size 6 4 OUT side (Applicable tube O.D.)

www.stevenengineering.com I FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE E210 & N320 1.123 LINEAR ACTUATOR: COMPACT CYLINDER SERIES NCQ2/CQ2 A C C E S S O R I E S ( M M ) S E R I E S N C Q 2 / C Q 2 S I N G L E R O D C L E V I S ( R O D E Y E ) A C C E S S O R I E S ( M M ) S E R I E S N C Q 2 / C Q 2 D O U B L E R O D C L E V I S ( R O D E Y E ) CQ2 SINGLE ROD

SIGNALS AND WIRING (2) Timing chart Servo-on (SON) accepted (1 to 2s) Main circuit Control circuit Power supply OFF ON Base circuit OFF ON 10ms 10ms 95ms Servo-on (SON) OFF ON 95ms ON OFF Reset (RES) 10ms 5ms 10ms 5ms 5ms 10ms OFF ON Ready (RD) Yes (OFF) No (ON) Trouble (ALM) 1s Power-on timing chart (3) Forced stop Configure a circuit which interlocks with an external emergency stop switch

(RD)((2)) (RY(n1)ARY(n3)A) (2) (RYn0) ON(RYn0) (22.5s) OFF ON ON(RYn0) (RY(n 1)A RY(n3)A) RD OFF ON 10ms 10ms 95ms (RYn0) OFF ON 95ms (RY(n1)A RY(n3)A) ON OFF 10ms 5ms 10ms 5ms 5ms 10ms OFF ON (RD) 4 8 4 (3) EMGEMG (E6) (EMG) (RYn1)(RYn2) RYn1RYn2 DC24V DICOM () DOCOM EMG .4.8.3 4 9 4 4.3.3 CNP1CNP2CNP3 13.913.1 CNP1CNP2CNP3 (1) LECSC(A) () CNP1 CNP1 54928-0670(Molex) 54928

7 w @5 q y !3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.

(Refer to paragraph (2) in this section.) 4) When the reset (RY(n+1)A or RY(n+3)A) is switched on, the base circuit is shut off and the servo motor shaft coasts. (2) Timing chart Servo-on (RYn0) accepted (2 to 2.5s) Main circuit Control circuit Power supply OFF ON OFF ON Base circuit 95ms 10ms 10ms 95ms OFF ON Servo-on (RYn0) Reset (RY(n+1)A or RY(n+3)A) ON OFF 10ms 5ms 10ms 5ms 5ms 10ms