Variation: A (Normally Closed, Bellows Seal), Flange Size: 16

Variation: A (Normally Closed, Bellows Seal), Flange Size: 25

Variation: A (Normally Closed, Bellows Seal), Flange Size: 40

Variation: Normally Closed, Bellows Seal, Flange Size: 16, Indicator, Actuator Port Direction: -, Temperature Specifications, Heater: -, Auto Switch: -, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change: -

Variation: Normally Closed, Bellows Seal, Flange Size: 25, Indicator, Actuator Port Direction: -, Temperature Specifications, Heater: -, Auto Switch: -, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change: -

Variation: Normally Closed, Bellows Seal, Flange Size: 40, Indicator, Actuator Port Direction: -, Temperature Specifications, Heater: -, Auto Switch: -, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change: -

XLAQ/XLDQ

B A A XLAQ Series Case A (mm) Weight (kg) Conductance (L/s) B (mm) Model XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 0.33 40 120 5 0.6 50 133 14 65 1.3 178 45 70 190 2.0 80 : Common to the XLAQ/XLDQ series Variations Variations Bellows seal, Single acting/XLAQ 2-step control, Single acting/XLDQ Bellows type is particulate free and completely cleaned. Pressure balancing mechanism.

One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50

The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting

One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50

One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: H0 (5 to 150°C, No Heater)

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: H0 (5 to 150°C, No Heater)

Valve Type: XYA (In-line Type, Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: H0 (5 to 150°C)

Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: H0 (5 to 150°C)

Valve Type: XYD (In-line Type, 2 State Control, Single Acting, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: H0 (5 to 150°C)

Valve Type: XMC (Angle Type, Double Acting, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std. Ind.,RearFlangeSide; N/A, Temperature: H0 (5 to 150°C)

Type: Pilot Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 40, Seal Type: Bellows Seal, Sonic Conductance: 45L/S, Valve Type: In-line type, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 150, Switch

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 40, Seal Type: Bellows Seal, Sonic Conductance: 45L/S, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 150, Switch Part Number: No auto-switch

Type: Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 40, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: No indicator, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 150, Switch Part