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ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 469 b XLAQ Series Specifications XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 Model Flange (valve) size 16 25 40 50 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (

CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. Barrel Perfluoro is a registered trademark of Matsumura Oil Co.,Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed & Co.

VMQ FKM for Plasma ULTIC ARMOR Example) XLD-25-M9NA-XAN1A U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. 448 XLD/XLDV Series Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve How to Order [Option] G XLDV M9N A L 1 25 !

Example) XLAV-16L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLAV-16, 25, 40, 50: SYJ319, XLAV-63, 80: SYJ519 Example) SYJ319-1GS, etc.

One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50

The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting

One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50

One-touch connection & release, requires no tools; Lightweight & compact; Auto switch capable; XLAQ: single acting, normally closed, bellows seal; XLAQ: flange sizes are 16, 25, 40, 50; XLDQ: 2-step control, single acting; XLDQ: flange sizes are 40, 50

(C) Correction factor 1.25 1.11 1 0.90 0.63 2 to 25 30 32 35 40 2 to 25 30 32 35 40 45 2 to 25 30 32 35 40 2 to 25 30 32 35 40 2 to 25 30 32 35 40 Note) For the water-cooled type, the correction factor is determined to 1 in an ambient temperature range of 2 to 45C.

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O RING FOR XLAQ-25, VACUUM SERIES, XLA NO SIZE RATING, 2.05326 lb

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLAQ-25, VACUUM SERIES, XLA NO SIZE RATING, 2.05326 lb

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLAQ-25, VACUUM SERIES, XLA NO SIZE RATING, 2.05326 lb

Part Number Description: INTERNAL O-RING FOR XLAQ-25   Product Line: Z   Product Line Description: VACUUM SERIES   Click here to report information errorImage shown may not match exact part number

Variation: Normally Closed, Bellows Seal, Flange Size: 25, Indicator, Actuator Port Direction: -, Temperature Specifications, Heater: -, Auto Switch: -, Lead Wire: -, Number of Switches, Mounting Position: -, X: -, Body Surface Treatment: -, Seal Material: -, Seal & Leakage Change: -