A 3 0 1.3 1.06 2.19 3/8-18 1 3/8 2.13 3 3/4 2.48 5 1/4 1 1 1/4 2 3/8 2 5/16 3/4-16 7/8 3/8 3/8 19/32 325 (3.25) 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 2.76 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 1 3/8 1 1/2 2 5/8 2 11/16 1-14 1/2 5/8 5/8 400 (4) 1 3/8 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 3.32 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 2 1/10 2 5/8 2 11/16 1-14 1/2 5/8 5/
Symbol Type Nil Rc F G N NPT Micro mist separator Mist separator Symbol Port size Applicable body size 70D 80D 90D 10 1 V 14 1 1/2 V V V 20 2 V Accessory Part Nos. 1 2 Description Model 70D 80D 90D Bracket AM-BM70D AM-BM90D L Includes mounting bolts (2 pcs.) Construction: AFF, AM, AMD t q IN OUT w Component Parts e No.
2) n = 2, 4, 6, 8 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 55 + 50(n 2) n = 2, 3, 4 75 + 50(n 2) n = 2, 4, 6, 8 80 + 50(n 2) n = 2, 4, 6, 8 90 + 50(n 2) n = 2, 4, 6, 8 Different sides D-A44C With n Same side 10 75 80 90 1 2 (Different sides and same side) With 1 85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W 15 + 40 (n 2) 2 n = 2, 4, 6, 8 80 + 40 (n 4) 2 n = 4, 8, 12, 16
Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221
2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different sides D-A44C n Same side 10 75 80 90 1 2 (Different sides, Same side), 1 15 80 85 90 95 105 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2
(n 2) n = 2, 3, 4, 5 Same side 100 + 100 (n 2), n = 2, 4, 6, 8, 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 Same side 20 + 35 (n 2) n = 2, 3, 4, 75 + 35 (n 2) n = 2, 4, 6, 8, 80 + 35 (n 2) n = 2, 4, 6, 8, 90 + 35 (n 2) n = 2, 4, 6, 8, 55 + 50 (n 2) n = 2, 3, 4, 75 + 50 (n 2) n = 2, 4, 6, 8, 80 + 50 (n 2) n = 2, 4, 6, 8, 90 + 50 (n 2) n = 2, 4, 6, 8, Different
1 *1 *2 1mm/s 2 15 Byte16,17 Byte 16 *1 *2 1% 17 *1 *2 21(P.85 40 - Byte18,19 Byte 18 *1 *2 1% 19 Byte20,21 Byte 20 *1 *2 1mm/s 21 Byte22,23 Byte 22 *1 *2 1% 23 Byte24-271 Byte 24 1 -+ *2 0.01mm 25 26 27 Byte28-312 Byte 28 2 -+ *2 0.01mm 29 30 31 Byte32-35 Byte 32 *1 *2 0.01mm 33 34 36 *1 *2 21(P.85 41 - 11 () 2 () () 3 11.1 12 64 )()[] 1 2 No. 2 mm/s mm 2 % mm mm mm/s
20+50 2 n=2, 4, 6, 8, Same Different mounting D-B59W Different mounting n=2, 3, 4, 20+35(n-2) n=2, 4, 6, 8, 75+35(n-2) n=2, 4, 6, 8, 80+35(n-2) n=2, 4, 6, 8, 90+35(n-2) D-A44C n=2, 3, 4, 75+50(n-2) n=2, 4, 6, 8, 90+50(n-2) n=2, 4, 6, 8, 100+50(n-2) n=2, 4, 6, 8, 110+50(n-2) Same Same side n=2, 3, 4, 55+50(n-2) n=2, 4, 6, 8, 75+50(n-2) n=2, 4, 6, 8, 80+50(n-2) n=2, 4, 6, 8, 90
1/2 8 11 11 13 16 With rod boot CLAL40SCLA40, #2 (#1+#2+#11) CLAL50SCLA50, #2 (#1+#2+#11) CLAL63SCLA63, #2 (#1+#2+#11) CLAL80SCLA80, #2 (#1+#2+#11) CLAL100SCLA100, #2 (#1+#2+#11) Without rod boot Bore (mm) l 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke Y h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14.0 e 43 52 52 65 65 ZZ 244 266 290 339 358 H 51 58 58 71 72 ZZ 252 274 298 348 367 40
Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.
Movement mode 1: ABS (Absolute) 2: INC (Relative) (7, 10) 2-7.
Same side Same side 110C K Heat resistant tarpaulin D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 15 50+45(n2) 50 10 Max. ambient temperature for rod boot n2 2 15+45( ) (n=2, 4, 6) 15 60+45(n2) 60 10 n2 2 15+50( ) (n=2, 4, 6) 15 65 10 65+50(n2) n2 2 20+50( ) (n=2, 4, 6) D-H7LF 20 65 10 n2 2 D-B5 D-B6 15+50( ) (n=2, 4, 6) 15 75 10 75+55(n2) n2 2 20+50( ) (n=2, 4, 6) D-B59W 20 75
0.28 5 XLA-25-2 50 121 0.47 14 B XLA-40-2 65 171 1.1 45 XLA-50-2 70 185 1.8 80 XLA-63-2 88 212 3.1 160 A XLA-80-2 90 257 5.1 200 *1 The same for all series Minimal outgassing Low outgassing makes it possible to use a lower capacity pump and also shorten exhaust time.
Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79
Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11
Flange Size: 80, Flange Type: D [K(DN)]
Flange Size: 80, Flange Type: D [K(DN)], Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
0.28 5 XLA-25-2 50 121 0.47 14 B XLA-40-2 65 171 1.1 45 XLA-50-2 70 185 1.8 80 XLA-63-2 88 212 3.1 160 A XLA-80-2 90 257 5.1 200 *1 The same for all series Minimal outgassing Low outgassing makes it possible to use a lower capacity pump and also shorten exhaust time.
Indicator: 6 High Vacuum Angle Valve Series XLA, XLAV Dimensions (mm) 1in = 25.4mm (b) XLA/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) Heater (optional) H B G A A (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 E Note 1) B 103 113 158 170 196 235 A 40 50 65 70 88 90 Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 12 11 11