There were no hits with the full part number, but there were 7 hits in the keyword search.

There were no hits with the full part number, but there were 4 hits in the keyword search.

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Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

Center Pusher (Cylinder type) Specifications MHZ Model MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA MHSH3-32DA Pusher cylinder bore size (mm) 20 25 32 40 12 MHF Fluid Air Made to Order (Refer to pages 683 to 713 for details.)

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

XM, XY

XMA-16-M9NA-XN1A Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed & Co.

XLAQ/XLDQ

Chemraz Example) XLDQ-40K-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 The material for the sliding parts of the S valve is FKM.

1

** M9NAV** M9NA** v v V v v IC circuit 3-wire (PNP) M9PAV** M9PA** M9PAV** M9PA** v v V v v 2-wire 12 V M9BAV** M9BA** M9BAV** M9BA** v v V v v Grommet WRF Water resistant (2-color indication) With diagnostic output (2-color indication) 4-wire (NPN) 5 V,12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V

Table of Contents

MRHQ Center Pusher (Cylinder type) Specifications MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA Model MHSH3-32DA Misc.

MHS

MHSH325D MHSH332D MHSH340D MHSH350D MHSH363D MHSH3MHSH380D mm 16 20 25 32 40 50 63 80 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 9 21 36 62 97 155 280 400 1 N 15 26 45 77 118 187 329 490 3H10 3H10 4H10 6H10 10H10 12H10 16H10 20H10 mm 4 4 6 8 8 12 16 20 g 90 140 220 410 570 970 1,650 2,920 1) 1625 =20mm 3263 =30mm 80 =50mm 0.5MPa MHSH3 / MHSH3-32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. Barrel Perfluoro is a registered trademark of Matsumura Oil Co.,Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed & Co.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA-16-M9NA-XN1A Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed & Co. ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 481 b

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: A (w/Indicator, Flange Side)

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/Indicator, Flange Side, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: B (1pc, Valve Open)

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 1pc, Valve Open, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet), Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -