There were no hits with the full part number, but there were 7 hits in the keyword search.

There were no hits with the full part number, but there were 4 hits in the keyword search.

Product Information » New Products Search Results

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

XM, XY

XMA-16-M9NA-XN1A Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed & Co.

XLAQ/XLDQ

Chemraz Example) XLDQ-40K-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 The material for the sliding parts of the S valve is FKM.

1

** M9NAV** M9NA** v v V v v IC circuit 3-wire (PNP) M9PAV** M9PA** M9PAV** M9PA** v v V v v 2-wire 12 V M9BAV** M9BA** M9BAV** M9BA** v v V v v Grommet WRF Water resistant (2-color indication) With diagnostic output (2-color indication) 4-wire (NPN) 5 V,12 V H7NF F79F V V v v IC circuit 3-wire (NPN equivalent) 5 V A96V A96 A96V A96 V V IC circuit Reed auto switch Yes 200 V

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd. Barrel Perfluoro is a registered trademark of Matsumura Oil Co.,Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed & Co.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA-16-M9NA-XN1A Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed & Co. ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 481 b

Flange Size: 63, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side)

Flange Size: 63, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 63, Flange Type: KF (NW), Port Direction: A (w/Indicator, Flange Side; w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: , Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: A [2 pcs (Valve Open/

Valve Type: Angle Type, Normally Closed, Bellows Seal, Flange Size: 63, Flange Type: KF (NW), Port Direction: w/Indicator, Flange Side; w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C (or n/a for XMH/XYH), Suffix: -, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: A [2 pcs (Valve Open/Closed)],

Flange Size: 63, Flange Type: KF(NW), Port Direction: A (w/Indicator, Flange Side), Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)

Flange Size: 63, Flange Type: KF(NW), Port Direction: w/Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

1 Lube with single end lock CBA1-63A-PS CBA1-50A-PS CBA1-40A-PS CBA1-80A-PS CBA1-100A-PS MGG 2 Cushion valve Rolled steel Electroless nickel plated !2 Non-lube with single end lock Quenching, Hard chrome plated CBA1N63A-PS CBA1N50A-PS CBA1N40A-PS CBA1N80A-PS CBA1N100A-PS 1 Lock piston Carbon steel !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

1 Lube with single end lock CBA1-63A-PS CBA1-50A-PS CBA1-40A-PS CBA1-80A-PS CBA1-100A-PS Cushion valve 2 Rolled steel Electroless nickel plated !2 MXP Non-lube with single end lock Quenching, Hard chrome plated CBA1N63A-PS CBA1N50A-PS CBA1N40A-PS CBA1N80A-PS CBA1N100A-PS Lock piston 1 Carbon steel !

CNA

CA1N 63A-PS Brake shoe Special friction material @5 80 CA1N 80A-PS Tie rod A for unit attachment Carbon steel Electrogalvanized chromated @6 100 CA1N100A-PS Tie rod B for unit attachment Carbon steel Electrogalvanized chromated @7 * As a general rule, the lock section of the CNA series is replaced as a unit, and therefore, the replacement seal kits are for the cylinder section only.

CNA

. $3, $4, $8 and $9. 63 CA1N 63A-PS Chromated Carbon steel Unit holding tie-rod A @6 80 CA1N 80A-PS Chromated Carbon steel Unit holding tie-rod B @7 100 CA1N100A-PS Chromated Carbon steel Tie-rod @8 Since the lock section for Series CNA is normally replaced as a unit, kits are for the cylinder section only. These can be ordered using the order number for each bore size.