XLA- ∗ -F7NJ ∗ - ∗ Series

-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 9 XL*-OML0013-B 5.

High Vacuum L Type Valve

-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

XLA-16-2 XLA-25-2 XLA-40-2 XLA-50-2 XLA-63-2 XLA-80-2 16 25 40 50 63 80 5605150 -6 Pa(abs) 110 l/s 1 5 14 45 80 160 200 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM MPa(G) 0.40.7 3 2 0.5MPa 31 61 220 390 680 1420 cm M5 Rc1/8 kg 0.28 0.47 1.1 1.7 3.1 5.1 1 21 9 XL-OMY0001 4-2 XLA-25-2 XLA-40-2 XLA-50-2 AC90240V XL1A25-60S-1 XL1A25-60S-1 1 1 H4 AC100V 200

XL-OMV0005

Symbol Standard Nil Optional Refer to XLA/XLC-16-2 16 Table 3 XLA/XLC-25-2 25 XLA/XLC-40-2 40 XLA/XLC-50-2 50 XLA/XLC-63-2 63 XLA/XLC-80-2 80 Note 1) Bellows assembly contains the valve seal 1.

XM, XY

80 40 50 65 70 88 90 P.C.D 27 70 P.C.D 58.7 6 x 6.6 114 P.C.D 92.1 8 x 8.4 95 110 XYA/In-line type C D XLA G Fd C XL (K flange) XLQ XM XY XM XY B DXSA XVD H 45 XGT A CYV E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64 84 95 118 142 H XYA-25 XYA-40 XYA-50 XYA-63 XYA-80 100.2 130 178

XLAQ/XLDQ

XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal

An auto switch cannot be retrofitted when a magnet is not mounted on the piston part (e.g., XLA-40-2 and XLA-40H5-2).

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal RoHS XLA/XLAV Series How to Order q w e r t y u XLA 2 M9N 16 A XLA e Indicator/Pilot port direction q Flange size w Flange type Rear flange surface Size 16 25 40 50 63 80 Symbol Indicator Pilot port direction Nil Without indicator Flange side A With indicator Symbol Type Applicable flange size Nil KF (NW) 16, 25, 40, 50, 63, 80

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Smooth Vent Valve

Chamber XLA XL XVD By switching to the main valve circuit, the main valve opens and the full amount is introduced into the chamber. XLQ Chamber XM XY DXSA XVD XVD XGT CYV 523 XVD Series Specifications Model XVD2-02V XVD2-02S Valve type Normally closed (Pressurize to open, Spring seal) Fluid Nitrogen, Air, Inert gas, etc.

Valve Type: Double Acting, Bellows Seal, Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9P--Solid State, Gen.

This is a legacy product, and replaced byXLA-40-2M9//, HIGH VACUUM VALVE, MAG NO SW, VACUUM SERIES, XLA HIGH VACUUM VALVE, 2X, XLA NO SIZE RATING, 2.88371 lb

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLA-40, VACUUM SERIES, XLA NO SIZE RATING, .01980 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERNAL SEAL (XLA-40), VACUUM SERIES, XLA NO SIZE RATING, .01980 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Large flow in-line style, Body sizes: 1/2, 3/4, 1, 1-1/4, 1-1/2, Port sizes: 1/4, 3/8, 1/2, 3/4, 1, 1-1/4, 1-1/2, 2, EXTERIOR SEAL FOR XLA-40, VACUUM SERIES, XLA NO SIZE RATING, .01980 lb

1

VM SUP blocking disk assembly SY30M-40-2A SY50M-40-1A SY70M-40-1A EXH blocking disk assembly Series SY3000 SY5000 SY7000 SY30M-40-1A SY50M-40-1A SY70M-40-1A XT34 Label for blocking disk If the blocking disk assembly is ordered using the manifold specification sheet and ordered at the same time as the manifold, the position where the blocking disk assembly is inserted will be labeled and

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Left flange surface Rear flange surface Right flange surface Right flange surface Left flange surface With indicator E H V I G L H A V V M A U C U Without indicator Flange side e Temperature specifications/Heater r Auto switch type Applicable flange size 25 40 50 Symbol Nil Auto switch part no.

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O RING FOR XLAQ-40, VACUUM SERIES, XLA NO SIZE RATING, .34393 lb

Please contact us for the latest version.sales@ocaire.com, EXTERNAL O-RING FOR XLAQ-40, VACUUM SERIES, XLA NO SIZE RATING, .34393 lb