Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -

Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B100-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D M3 x 25l x 30l x 35l x 40l x 45l x 50l M3 x 25l x 30l x 35l x 40l x 45l x 50l

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B100-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D M8 x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 125l x 150l M10

CQ2

CQ2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B100-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQ2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D 6.5 14.5 9 5 15 7.5 7.5 9.5 15.5 12.5 2.3-5 Series CQ2 Construction Component

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

4 6 P NC 21 25 TB 16 20 UA M8 x 1.25 UB 16 20 8H9 10H9 VA Model MHSL3-100D MHSL3-125D Rc 1/4 (G 1/4, NPT 1/4) Rc 3/8 (G 3/8, NPT 3/8) +0.036 0 +0.036 0 0 -0.043 0 -0.052 +0.036 0 +0.036 0 8H9 18h9 10H9 22h9 M10 x 1.5 M10 x 1.5 XA XB 6 8 VB 6 8 WA WB 4 6 Model MHSL3-100D MHSL3-125D +0.036 0 +0.036 0 +0.087 0 +0.100 0 8H9 102H9 10H9 130H9 594 Series MHSL3 Parallel Style Air Gripper/3-Finger

Table of Contents

SB, counterbore depth SC P .C.D.R (Mounting hole) Auto switch mounting groove positions (4 locations) MHS3-100D MHS3-125D 10 10 10 10 40 40 40 40 5 6.4 5 10 6.4 13 90 12 5 15 7 90 (mm) I G 63 84 FZ 10 12 FX 59 74 FY 54 68 CA 18 23.5 EC 28 30 EO 40 46 DC 66 82 DO 78 98 M 4 6 B 134 166 K 15 21 AC 6 8 J 38 52 AA 96 122 AB 90 114 NA 34 40 L +0.036 0 +0.036 0 NB Model MHS3-100D MHS3-125D CB 30.6

Compact Hydraulic Cylinder

(Example) CHDQB50-100D Applicable Auto Switches: Refer to pages 347 to 406 for further details on each auto switch.

Compact Hydraulic Cylinder

(Example) CHDQB50-100D Applicable Auto Switches/Refer to pages 431 to 490 for further details on each auto switch.

CLQ

-100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D 8.5 -30D -30D -30D -30D -35D -35D -35D -35D 16.5 15.5 8.5 -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D -100D -100D -100D 4 Series CLQ Construction/20 to 32 A B A' B'

Compact Cylinder with Lock Series CLQ

-100D -100D x 175 L x 190 L x 215 L 175 190 215 819 Series CLQ Construction: 20 to 32 i o !

Compact Cylinder

CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B63-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B80-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B100-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D

Compact Cylinder with Lock Series CLQ

-100D -100D M10 x 125l x 130l x 135l x 140l x 145l x 150l x 155l x 160l x 165l x 190l x 215l -10D CDLQB40-10D CDLQB63-10D CDLQB100-10D -15D -15D -15D -15D -20D -20D -20D -20D -25D -25D -25D -25D 8.5 -30D -30D -30D -30D -35D -35D -35D -35D 16.5 15.5 8.5 -40D -40D -40D -40D -45D -45D -45D -45D -50D -50D -50D -50D -75D -75D -75D -100D -100D -100D 4 Series CLQ Construction/20 to 32 A B A' B

CLQ

75D x 165l x 190l -100D -100D -100D x 190l x 215l 9-10-11 11 Series CLQ Construction: 20 to 32 i o !

Hydraulic

(M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M) x 165l 100D (M) 100D (M) M5 x 75l x 80l x 85l M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 145l x 170l CHQB100 10D

NCQ2/CQ2

60 65 6.5 14.5 9 80 85 5 125 150 CQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D 35 40 45 50 55 60 65 70 75 80 65 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L 15 7.5 85 90 7.5 -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D x 140L CQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D 45 50 55 60 65 70 75

High Vacuum Angle Valve

Heater: Indicator: 418 B XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79

Aluminum High Vacuum Angle Valve

Heater: Indicator: 418 A XLA/XLA V Series Aluminum High Vacuum Angle Valve Dimensions XLA/Air operated (b) E C D C E E Fn (KF flange) B (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G A A (mm) A B C D Fn Fd G H E Note 1) Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 40 17 30 1 38 40 103 39 26 40 12 1 48 50 113 63 41 55 11 2 66 65 158 68 52 75 11 2 79