Micro Mechanical Valve Series VM1000

-34CY VM-36C Push button (Flush) VZM550-01-33 177 VH VZM550-01-34R Red Black VZM550-01-34B Twist selector (2 position) 178 VHS Green VZM550-01-34G Yellow VZM550-01-34Y Key selector (2 position) VZM550-01-36 VHS 197 170 Black Push-pull VZM550-01-37 Note 1) Actuator replacement is available for all types.

V

www.stevenengineering.com I S E E I N S I D E F R O N T C O V E R F O R DETAILS OF YOUR LOCAL SALES OFFICE 2.94 MECHANICAL VALVES SERIES (N)VZM550 5/2 MECHANICAL VALVE 18 PORT SERIES (N)VZM550 Many Different Actuators High Flow Cv 0.6 High Cycle Rate Long Life Interfaces with VZ5000 210 Station Type 21 Manifold H O W T O O R D E R (N)VZM550 V A LV E H O W T O O R D E R (N)VZM550 A C T U AT

VZM400

-01-34B Twist selector (2 position) VM-34CG Green VZM550-01-34G VM-34CY Yellow VZM550-01-34Y VM-36C Key selector (2 position) VZM550-01-36 Black Push-pull VZM550-01-37 Note 1) Actuator replacement is available for all types.

VM

selector (2 position) Black Green Yellow Key selector (2 position) VM-34CB VZM550-01-34B VM-34CG VZM550-01-34G VM-34CY VZM550-01-34Y VM-36C VZM550-01-36 Black Push-pull VZM550-01-37 Note) Actuator replacement is available for all styles.

Ozone Resistant

220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves

ZP

Hexagon width across flats 24 25 G Width across flats 37 45 45 4-M4 x 0.7 4-M4 x 0.7 E 10 10 G Width across flats 37 F F E Y Y 8 8 34 34 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT63HB-A16 ZPT63HB-B8 63 65.1 45.5 67.6 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58.4 85.1 37 48.5 78.5 27.5 M10 x 1.5 63 65.1 45.5 67.6 31.5 43 21.5 -B12

ZP

N A B C D E M Y E N Y A B C D M Model Model ZPY20B--A10 ZPY40B-6-A14 51.5 12.4 25 23.5 33.5 20 22 16 62 24.4 48 40 43 34 44 10.5 ZPY25B--A10 ZPY50B-6-A14 50 53 38 48 66 32.4 57 19 52 15.6 28 24 34 25 27 ZPY32B--A10 32 34 29 39 57 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 H Model F G F G Model 20 25 32 H 4 tube 6 tube ZPYB10-6-A14 74 142 78 146 F G F G F G J K L J K L ZPYB20

ZP

47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Vacuum Pad

G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F

Vacuum Pad

G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F

Vacuum Pad

G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F

Vacuum Pad

G 28 3 x M3 x 8 E F G E F G Y Y Y 3 8 8 34 40 18 C C C A A A B B B D D D Dimensions A 100 125 Dimensions A 40 50 Dimensions A 63 80 B 103 129 C 69 89 D 107 135 B 41 52 C 28 36 D 43 54 B 65 83 C 46 58 D 68 85 Model ZPT100HB-A16 ZPT125HB-A16 Model ZPT40HB-A14 ZPT50HB-A14 Model ZPT63HB-A16 ZPT80HB-A16 E 20.5 24 F 32 35.5 G 62 65.5 Y 13 16.5 E 47.5 56 F 60.5 69 G 90.5 99 Y 35.5 44 E 31.5 37 F

Table of Contents

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 8.4 9.3

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y 4 4 Connection 1.6 thread 29 B D 6 15 10 94 40 43 15 99 45 25 109 55 63 37 02 1.2 Width across flats 12 A N S U F GN GS 6 63 37 15 10 94 40 43 15 99 45 25 109 55 N4 N6 U4 U6 J K ZP Y U 04 A8 1.6 Width across flats 7 6 63 37 15 10 94 40 43 15 99 45 25 109 55 06 08 2.5 F 17.5 Dimensions Per Vacuum Inlet C2 Model E F Fitting part

AS

AS121FM-U10/32-01 AS121FM-U10/32-03 AS121FM-U10/32-05 AS121FM-U10/32-07 AS221FM-N01-01 AS221FM-N01-03 AS221FM-N01-05 AS221FM-N01-07 AS221FM-N01-09 AS221FM-N02-03 AS221FM-N02-05 AS221FM-N02-07 AS221FM-N02-09 AS221FM-N02-11 1/8" 8.4 12.7 22.1 12.3 17.3 KE 5/32" 9.3 7 9.6 28.8 25.1 30.1 8 33.8 10-32 UNF 16.5 26.1 21.3 11.4 3/16" 11.7 13.5 23.1 18.3 12 1/4" TMH 16 1/8" 27.5 20.4 9.3 12.7 5/32

Table of Contents

Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 5 Series IF3 Flow Rate vs.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

width across flats 24 SP 25 G Width across flats 37 45 45 ZCUK 4 x M4 x 0.7 4 x M4 x 0.7 E 10 10 AMJ G Width across flats 37 F F E AMV Y Y AEP 8 8 34 34 HEP C C A A Related B D B D Equipment Dimensions A Dimensions A B C D E F G Y Model B C D E F G Y Model ZPT63HB-A16 ZPT63HB-B 8 63 65 46 68 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58 85 37 48.5 78.5 27.5 M10 x 1.5 63 65 46 68 31.5

Table of Contents

A B C D E F G H J Bracket dimensions Bracket part no.

Mist Separator Regulator

How to Replace the Components] (P28-37) [12. Disassembly Drawing] (P38-39). This is an assembly of a bracket and set nut (2). Note 1) Note 2) Part number for 0.2 MPa: G36-4-01 (Rc type) / G36-4-N01 (NPT type) / G36-P4-N01-X30 (NPT, Z type). Note 3) G46-4-01 (Rc type) / G46-4-N01 (NPT type) / G46-P4-N01-X30 (NPT, Z type). With O-ring (1 pc.) and mounting screws (2 pcs.).

Ｍ icro Mist Separator Regulator

How to Replace the Components] (P28-37) and This is an assembly of a bracket and set nut (2). Part number for 0.2 MPa: G36-4-01 (Rc type) / G36-4-N01 (NPT type) / G36-P4-N01-X30 (NPT, Z type). G46-4-01 (Rc type) / G46-4-N01 (NPT type) / G46-P4-N01-X30 (NPT, Z type). With O-ring (1 pc.) and mounting screws (2 pcs.).